CAS OpenIR  > 中科院上海原子核所2003年前
Surface-compositional and angular distributions during Cu-Pt sputtering
Zheng, LP(郑里平); Li, RS
1998
Source PublicationJOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
ISSN1005-0302
Volume14Issue:4Pages:335
AbstractUnder 1 keV Ar ion bombardment of Cu-Pt alloys at high fluence and low temperature, the depletion degree of the segregating species at the second surface layer, and the normalized sputtering yield ratios (non-segregating species/segregating species) in the near-normal direction (15 degrees) and at oblique angle (75 degrees), have been estimated by an improved kinetic BIGS (bombardment-induced Gibbsian segregation) model. For the bombarded Cu-Pt alloys, calculations show that the depletion degree of the segregating species at the second surface layer is small when its bulk composition equals the extreme value, but this depletion degree becomes large when its bulk composition equals the intermediate value. Furthermore, the difference of the normalized sputtering yield ratio between 15 degrees and 75 degrees is small when the bulk composition of the segregating species equals the extreme value, but this difference becomes large when that of the segregating species equals the intermediate value.
Indexed BySCI
Funding Project应物所项目组
WOS IDWOS:000074996700010
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/10205
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
Zheng, LP,Li, RS. Surface-compositional and angular distributions during Cu-Pt sputtering[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,1998,14(4):335.
APA Zheng, LP,&Li, RS.(1998).Surface-compositional and angular distributions during Cu-Pt sputtering.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,14(4),335.
MLA Zheng, LP,et al."Surface-compositional and angular distributions during Cu-Pt sputtering".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 14.4(1998):335.
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