CAS OpenIR  > 中科院上海应用物理研究所2004-2010年
Studies of the super-smooth mirror roughness by grazing incidence Xray scattering method
Du, WT; Song, L(宋丽); Wang, YZ; Luo, HX(罗红心); Wang, J(王劼)
2011
Conference NameInternational Conference on Optical Instruments and Technology (OIT) - Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology
Conference DateNOV 06-09, 2011
Conference PlaceBeijing, PEOPLES R CHINA
Funding OrganizationChina Instrument & Control Soc (CIS), Chinese Opt Soc (COS), SPIE
AbstractThe surface roughness of a large-size super-smooth mirror is studied by grazing incidence X-ray scattering method (GIXRS). We derive the two-dimensional theoretical model based on Tong's result in 1993; In light of our formulae, the power spectrum density (PSD) of a mirror surface can be correlated to the intensity distribution of X-ray scattering. A 210mm-long mirror is measured at the beamline 16B at Shanghai Synchrotron Radiation Facility (SSRF) and the data is analyzed. The result indicates that the root mean square (RMS) of the surface roughness calculated by our formulae is in good agreement with that measured by a white-light 3D profiler.
ISSN0277-786X
ISBN978-0-81948-843-5
Indexed BySCI
Funding Project应物所课题组
Language英语
Document Type会议论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/10270
Collection中科院上海应用物理研究所2004-2010年
Recommended Citation
GB/T 7714
Du, WT,Song, L,Wang, YZ,et al. Studies of the super-smooth mirror roughness by grazing incidence Xray scattering method[C],2011.
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