CAS OpenIR  > 中科院上海原子核所2003年前
长程面形仪
肖体乔; 夏绍建; 余笑寒
Date Available2013-01-23
Country中国
Subtype发明专利
Abstract一种长程面形仪,它主要由半导体激光器、光纤、 位相板、反射镜、分光镜、五角棱镜、反射镜、傅立叶透镜、 面阵CCD和参考反射镜组成,半导体激光器发出的激光束经 光纤准直投射至一块位相板上,其衍射光束由反射镜折转形成 基准光束被分光镜分为两路:一路经五角棱镜折转90°投射至 被测表面,被反射回来的探测光束再经五角棱镜、分光镜、反 射镜投射至傅立叶变换透镜,从而在位于FT透镜后焦面的面 阵CCD上形成测量光斑,另一路基准光束经由参考反射镜、 反射镜直接射至傅立叶透镜,并在面阵CCD上形成参考光斑。
Subject AreaG01b11/24 ; G02b26/10
Funding Project应物所课题组
Language中文
Status20050831 授权
Application NumberCN02110541
Patent Agent邓琪
Document Type专利
Identifierhttp://ir.sinap.ac.cn/handle/331007/10452
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
肖体乔,夏绍建,余笑寒. 长程面形仪.
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