长程面形仪

CAS OpenIR > 中科院上海原子核所2003年前

	长程面形仪
	肖体乔; 夏绍建; 余笑寒
Date Available	2013-01-23
Country	中国
Subtype	发明专利
Abstract	一种长程面形仪，它主要由半导体激光器、光纤、位相板、反射镜、分光镜、五角棱镜、反射镜、傅立叶透镜、面阵CCD和参考反射镜组成，半导体激光器发出的激光束经光纤准直投射至一块位相板上，其衍射光束由反射镜折转形成基准光束被分光镜分为两路：一路经五角棱镜折转90°投射至被测表面，被反射回来的探测光束再经五角棱镜、分光镜、反射镜投射至傅立叶变换透镜，从而在位于FT透镜后焦面的面阵CCD上形成测量光斑，另一路基准光束经由参考反射镜、反射镜直接射至傅立叶透镜，并在面阵CCD上形成参考光斑。
Subject Area	G01b11/24 ; G02b26/10
Funding Project	应物所课题组
Language	中文
Status	20050831 授权
Application Number	CN02110541
Patent Agent	邓琪
Document Type	专利
Identifier	http://ir.sinap.ac.cn/handle/331007/10452
Collection	中科院上海原子核所2003年前
Recommended Citation GB/T 7714	肖体乔,夏绍建,余笑寒. 长程面形仪.

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