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27keV Ar~+斜入射时的Cu-Au合金溅射实验角分布
王震遐; 陶振兰; 郑里平; 曹德新; 邹志宜; 周祖尧; 周伟
Source Publication核技术
Abstract用27keV Ar~+分别在垂直和倾斜入射情况下;轰击了Cu-Au(30wt%)合金样品;测量了Cu和Au原子的溅射角分布。角分布是用卢瑟福背散射(RBS)技术分析Al捕获膜上的Cu-Au沉积成分而定量得到的。结果表明:(1)在Ar~+倾斜(θ=40°)入射时;Cu原子择优发射;且程度比垂直入射(θ_r=O°)时增强:(2)倾斜入射时;Cu原子的角分布显示出在接近于样品表面法线方向的发射角范围内(θ<45°);发射机率比垂直入射时减小。
Indexed ByCNKI
Funding Project原子核所项目组
Document Type期刊论文
Recommended Citation
GB/T 7714
王震遐,陶振兰,郑里平,等. 27keV Ar~+斜入射时的Cu-Au合金溅射实验角分布[J]. 核技术,1988(04).
APA 王震遐.,陶振兰.,郑里平.,曹德新.,邹志宜.,...&周伟.(1988).27keV Ar~+斜入射时的Cu-Au合金溅射实验角分布.核技术(04).
MLA 王震遐,et al."27keV Ar~+斜入射时的Cu-Au合金溅射实验角分布".核技术 .04(1988).
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