CAS OpenIR  > 中科院上海原子核所2003年前
27keVAr~+离子轰击Fe-W合金的溅射原子角分布研究
王震遐; 郑里平; 陶振兰; 潘冀生
1989-03-02
Source Publication核技术
Issue02
Abstract本文报道在27keV Ar~+离子轰击Fe-W(30wt.%)合金情况下;溅射Fe和W原子的角分布实验结果。用卢瑟福背散射(RBS)谱仪分析了不同发射角θ处溅射沉积在衬底上的Fe-W薄膜的成分。结果表明;角分布形状均为over-cosine型;且W原子对Fe原子的比值与发射角θ有关。与我们以前关于Cu-Au合金和Ti-Ni合金的结果比较;暗示择优溅射程度可能与合金成分的质量比值有关。简单的模型分析发现;靶表面形貌是引起溅射原子角分布变化的重要因素。
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/10819
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
王震遐,郑里平,陶振兰,等. 27keVAr~+离子轰击Fe-W合金的溅射原子角分布研究[J]. 核技术,1989(02).
APA 王震遐,郑里平,陶振兰,&潘冀生.(1989).27keVAr~+离子轰击Fe-W合金的溅射原子角分布研究.核技术(02).
MLA 王震遐,et al."27keVAr~+离子轰击Fe-W合金的溅射原子角分布研究".核技术 .02(1989).
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