CAS OpenIR  > 中科院上海原子核所2003年前
9微来红外吸收法测定硅单晶中氧含量的标定曲线
李月珍; 何焕南; 赵关弟; 严荣华; 吕庆仁; 祁明维; 章家鼎; 华芝芬
1983-01-31
Source Publication半导体学报
Issue01
Abstract本文用氦载气熔化-气相色谱建立了红外吸收法测定硅单晶中间隙氧的标定曲线.由于熔化法中实验条件的控制和试样准备的改进;降低了空白;提高了数据的重现性;做出较可靠的标定曲线(其换算常数为6.2ppmA/cm~(-1)).优于文献中其它的标定曲线.
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/10853
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
李月珍,何焕南,赵关弟,等. 9微来红外吸收法测定硅单晶中氧含量的标定曲线[J]. 半导体学报,1983(01).
APA 李月珍.,何焕南.,赵关弟.,严荣华.,吕庆仁.,...&华芝芬.(1983).9微来红外吸收法测定硅单晶中氧含量的标定曲线.半导体学报(01).
MLA 李月珍,et al."9微来红外吸收法测定硅单晶中氧含量的标定曲线".半导体学报 .01(1983).
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