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Al-50wt% Sn合金的离子溅射研究
王震遐; 章骥平; 潘冀生; 陶振兰; 张慧明; 赵烈; 曾跃武; 王承宝; 林祯昌
Source Publication物理学报
Abstract用捕获膜技术和卢瑟福背散射(RBS)分析;测定Al-Sn多相合金在30keV Ar~+离子轰击时Al和Sn的溅射原子角分布。溅射后的样品用扫描电子显微镜(SEM)进行观察;并用电子微探针分析仪(EPMA)对轰击样品(靶点)和未轰击样品作成分分析。结果表明;Al的溅射原子角分布近于cosine形状;而Sn却是over-cosine型角分布。本文给出一个按不同表面形貌特征划分的各元素富集区i进行叠加的产额表达式;Y(θ)=∑Y_i(θ);解释了实验结果。
Indexed ByCNKI
Funding Project原子核所项目组
Document Type期刊论文
Recommended Citation
GB/T 7714
王震遐,章骥平,潘冀生,等. Al-50wt% Sn合金的离子溅射研究[J]. 物理学报,1992(09).
APA 王震遐.,章骥平.,潘冀生.,陶振兰.,张慧明.,...&林祯昌.(1992).Al-50wt% Sn合金的离子溅射研究.物理学报(09).
MLA 王震遐,et al."Al-50wt% Sn合金的离子溅射研究".物理学报 .09(1992).
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