CAS OpenIR  > 中科院上海原子核所2003年前
Ar离子轰击Ag靶的溅射角分布
潘浩昌; 陶振兰; 郑里平; 曹德新; 张衡山; 张阿虎; 周祖尧; 周伟
1988-05-30
Source Publication核技术
Issue05
Abstract本文描述了用溅射粒子捕集器和Rutherford背散射分析测定溅射粒子角分布的实验方法。给出了100keV Ar~+在入射角分别为0°、30°、50°和80°时轰击Ag靶的溅射角分布。角分布偏离余弦形状;有前倾趋势。溅射产额随入射角增大而迅速增加。由50keV Ar~+垂直入射Ag的溅射角分布计算出的总溅射产额为16.8±2.4~(atoms)/Ar~+。实验结果与理论值进行了比较;并作了定性分析。
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/10870
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
潘浩昌,陶振兰,郑里平,等. Ar离子轰击Ag靶的溅射角分布[J]. 核技术,1988(05).
APA 潘浩昌.,陶振兰.,郑里平.,曹德新.,张衡山.,...&周伟.(1988).Ar离子轰击Ag靶的溅射角分布.核技术(05).
MLA 潘浩昌,et al."Ar离子轰击Ag靶的溅射角分布".核技术 .05(1988).
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