CAS OpenIR  > 中科院上海原子核所2003年前
Ni-50wt%Ti合金的择优溅射
王震遐; 王玟珉; 罗文芸; 李欣年; 王传珊
1996-11-30
Source Publication物理学报
Issue11
Abstract用卢瑟福背散射技术测定了Ni50wt%Ti合金在30keVAr+离子轰击时的组分原子(Ni和Ti)溅射角分布.结果表明;Ni原子和Ti原子的角分布存在差别:Ni原子在靶表面法线方向(发射角θ=0°附近)择优发射;而Ti原子则在大发射角区域(θ>45°)发射较Ni强.根据元素在靶点表面按形貌特征局域富集情况的观测;对实验结果进行了讨论
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/10996
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
王震遐,王玟珉,罗文芸,等. Ni-50wt%Ti合金的择优溅射[J]. 物理学报,1996(11).
APA 王震遐,王玟珉,罗文芸,李欣年,&王传珊.(1996).Ni-50wt%Ti合金的择优溅射.物理学报(11).
MLA 王震遐,et al."Ni-50wt%Ti合金的择优溅射".物理学报 .11(1996).
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