背散射法测定低能氩离子对金的溅射率

CAS OpenIR > 中科院上海原子核所2003年前

	背散射法测定低能氩离子对金的溅射率
	明嘉增; 陈国明; 周祖尧; 任琮欣; 杨絜; 傅新定; 朱德彰; 曹德新
	1987-09-28
Source Publication	核技术
Issue	09
Abstract	本文用背散射方法测定了300—1200eV不同能量的氩离子对金的溅射率。实验测得的背散射能谱用两种不同的方法(能量损失和面积法)处理;结果表明;用背散射法测得金的溅射率与G.K.Wehner用称重法测定的数据很接近;其与入射离子能量的关系为Y∝E~(0.4)。
Indexed By	CNKI
Language	中文
Funding Project	原子核所项目组
Document Type	期刊论文
Identifier	http://ir.sinap.ac.cn/handle/331007/11097
Collection	中科院上海原子核所2003年前
Recommended Citation GB/T 7714	明嘉增,陈国明,周祖尧,等. 背散射法测定低能氩离子对金的溅射率[J]. 核技术,1987(09).
APA	明嘉增.,陈国明.,周祖尧.,任琮欣.,杨絜.,...&曹德新.(1987).背散射法测定低能氩离子对金的溅射率.核技术(09).
MLA	明嘉增,et al."背散射法测定低能氩离子对金的溅射率".核技术 .09(1987).

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