CAS OpenIR  > 中科院上海原子核所2003年前
超高真空计量截止阀
倪金文
1984-09-30
Source Publication真空与低温
Issue03
Abstract<正> 一、引言目前在诸如离子源等电物理装置上都需要供气系统;以供给不同气种和气量的气体。国内一般都使用微调针形阀控制工作气体的流量;但在气源为一百多个大气压的瓶装气体时;就必须配备以稳压减压阀使
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/11145
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
倪金文. 超高真空计量截止阀[J]. 真空与低温,1984(03).
APA 倪金文.(1984).超高真空计量截止阀.真空与低温(03).
MLA 倪金文."超高真空计量截止阀".真空与低温 .03(1984).
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