CAS OpenIR  > 中科院上海原子核所2003年前
低能离子溅射引起表面损伤的研究
周祖尧; 任琮欣; 陈国明; 胡嘉增; 杨洁; 傅新定; 邹世昌; 朱德彰; 曹德新
1986-07-30
Source Publication核技术
Issue07
Abstract本文应用背散射沟道技术研究了低能离子轰击不同晶向表面所引起的晶格损伤与离子能量、剂量的关系;讨论了损伤形成的动力学过程。
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/11254
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
周祖尧,任琮欣,陈国明,等. 低能离子溅射引起表面损伤的研究[J]. 核技术,1986(07).
APA 周祖尧.,任琮欣.,陈国明.,胡嘉增.,杨洁.,...&曹德新.(1986).低能离子溅射引起表面损伤的研究.核技术(07).
MLA 周祖尧,et al."低能离子溅射引起表面损伤的研究".核技术 .07(1986).
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