CAS OpenIR  > 中科院上海原子核所2003年前
高剂量铂和钇离子注入Al_2O_3单晶的表面改性
谢东珠; 朱德彰; 潘浩昌; 曹德新; 徐洪杰
1999-04-10
Source Publication核技术
Issue04
Abstract研究了<0001>和<1210>晶向α-Al2O3单晶在高剂量的Y、Pt离子注入后产生的损伤;注入层的性能变化和退火行为。实验结果表明;在室温;171keV、1×1017/cm2Y离子注入的<1210>α-Al2O3单晶的表面层约有139nm厚被无定形化。而158keV、9×1017/cm2Pt离子注入的<0001>α-Al2O3单晶的表面层不产生无定形;且实际离子注入进衬底的剂量只有2.65×1016/cm2;绝大部分在注入过程中被溅射掉。注入后其表面层的硬度提高了大约50%。表面层的电阻率降低了12个数量级。在空气中退火后形成了随机取向的纳米量级大小的Pt微晶;表面层的硬度也有所降低;但仍稍高于未注入的单晶硬度。
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/11428
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
谢东珠,朱德彰,潘浩昌,等. 高剂量铂和钇离子注入Al_2O_3单晶的表面改性[J]. 核技术,1999(04).
APA 谢东珠,朱德彰,潘浩昌,曹德新,&徐洪杰.(1999).高剂量铂和钇离子注入Al_2O_3单晶的表面改性.核技术(04).
MLA 谢东珠,et al."高剂量铂和钇离子注入Al_2O_3单晶的表面改性".核技术 .04(1999).
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