CAS OpenIR  > 中科院上海原子核所2003年前
高能离子注入及其应用
林森浩; 王玟珉
1990-06-30
Source Publication物理
Issue06
Abstract本文介绍了高能离子(Mev/amu)与固体相互作用的特点;综述了近几年来高能离子注入技术在制备多层结构晶体管、减少载流子寿命、材料表面改性及增强薄膜与基体粘着力等方面的研究概况.
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/11431
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
林森浩,王玟珉. 高能离子注入及其应用[J]. 物理,1990(06).
APA 林森浩,&王玟珉.(1990).高能离子注入及其应用.物理(06).
MLA 林森浩,et al."高能离子注入及其应用".物理 .06(1990).
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