基本参数法X射线荧光测厚

CAS OpenIR > 中科院上海原子核所2003年前

	基本参数法X射线荧光测厚
	乐安全; 朱节清; 徐君权
	1982-05-01
Source Publication	核技术
Issue	04
Abstract	本文简要介绍了用放射性核素的非单能初级辐射;非破坏地绝对测量极薄层厚度的X射线荧光测厚技术。测量薄层厚度的精确度好于1.1％。与空气等效法α测厚仪的测量结果对照;相对偏差小于3.8％。
Indexed By	CNKI
Language	中文
Funding Project	原子核所项目组
Document Type	期刊论文
Identifier	http://ir.sinap.ac.cn/handle/331007/11593
Collection	中科院上海原子核所2003年前
Recommended Citation GB/T 7714	乐安全,朱节清,徐君权. 基本参数法X射线荧光测厚[J]. 核技术,1982(04).
APA	乐安全,朱节清,&徐君权.(1982).基本参数法X射线荧光测厚.核技术(04).
MLA	乐安全,et al."基本参数法X射线荧光测厚".核技术 .04(1982).

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