CAS OpenIR  > 中科院上海原子核所2003年前
基本参数法X射线荧光测厚
乐安全; 朱节清; 徐君权
1982-05-01
Source Publication核技术
Issue04
Abstract本文简要介绍了用放射性核素的非单能初级辐射;非破坏地绝对测量极薄层厚度的X射线荧光测厚技术。测量薄层厚度的精确度好于1.1%。与空气等效法α测厚仪的测量结果对照;相对偏差小于3.8%。
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/11593
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
乐安全,朱节清,徐君权. 基本参数法X射线荧光测厚[J]. 核技术,1982(04).
APA 乐安全,朱节清,&徐君权.(1982).基本参数法X射线荧光测厚.核技术(04).
MLA 乐安全,et al."基本参数法X射线荧光测厚".核技术 .04(1982).
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