CAS OpenIR  > 中科院上海原子核所2003年前
聚乙炔的离子注入法掺杂
林森浩; 盛康龙; 鲍锦荣; 荣廷文; 邹志宜; 沈之荃; 杨慕杰
1987-08-29
Source Publication高分子学报
Issue04
Abstract<正> 离子注入是一种物理摻杂方法;在半导体器件的制备中已得到广泛的应用;它与常规的化学、电化学或热扩散掺杂相比具有一些特点:可以通过质量分析器选取单一的注入离子;故掺杂杂质的纯度高;根据注入离子的剂量和能量;精确控制到掺人杂质的数量和深度等等。近年来;采用离子注入技术进行掺杂;改变聚合物或其它绝缘材料表面性质的研究已逐步引起重视真视。
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/11698
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
林森浩,盛康龙,鲍锦荣,等. 聚乙炔的离子注入法掺杂[J]. 高分子学报,1987(04).
APA 林森浩.,盛康龙.,鲍锦荣.,荣廷文.,邹志宜.,...&杨慕杰.(1987).聚乙炔的离子注入法掺杂.高分子学报(04).
MLA 林森浩,et al."聚乙炔的离子注入法掺杂".高分子学报 .04(1987).
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