CAS OpenIR  > 中科院上海原子核所2003年前
空气等效法α测厚仪
朱节清; 乐安全
1981-05-01
Source Publication核技术
Issue04
Abstractα测厚仪用于任何材料的超薄膜厚度测量;范围0~4mg/cm~2;精密度好于1.5%。由于采用了空气等效法;使测量过程能在空气中进行。仪器简单、精密度高。本文推导了相对质量阻止本领作为E_α、Z和A的函数的半经验公式;它和齐格勒数据表的偏差小于8%。
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/11717
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
朱节清,乐安全. 空气等效法α测厚仪[J]. 核技术,1981(04).
APA 朱节清,&乐安全.(1981).空气等效法α测厚仪.核技术(04).
MLA 朱节清,et al."空气等效法α测厚仪".核技术 .04(1981).
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