空气等效法α测厚仪

CAS OpenIR > 中科院上海原子核所2003年前

	空气等效法α测厚仪
	朱节清; 乐安全
	1981-05-01
Source Publication	核技术
Issue	04
Abstract	α测厚仪用于任何材料的超薄膜厚度测量;范围0～4mg/cm~2;精密度好于1.5％。由于采用了空气等效法;使测量过程能在空气中进行。仪器简单、精密度高。本文推导了相对质量阻止本领作为E_α、Z和A的函数的半经验公式;它和齐格勒数据表的偏差小于8％。
Indexed By	CNKI
Language	中文
Funding Project	原子核所项目组
Document Type	期刊论文
Identifier	http://ir.sinap.ac.cn/handle/331007/11717
Collection	中科院上海原子核所2003年前
Recommended Citation GB/T 7714	朱节清,乐安全. 空气等效法α测厚仪[J]. 核技术,1981(04).
APA	朱节清,&乐安全.(1981).空气等效法α测厚仪.核技术(04).
MLA	朱节清,et al."空气等效法α测厚仪".核技术 .04(1981).

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