CAS OpenIR  > 中科院上海原子核所2003年前
离子溅射的微区叠加原理
王震遐
1994-01-30
Source Publication物理学报
Issue01
Abstract荷能离子轰击固体表面在往使表面产生特定的结构;因而改变溅射总产额和微分产额。这些变化是由于表面结构改变而引起的几种效应;例如弹离子入射角、形貌对发射粒子的屏蔽以及合金表面元素按微区局域富集等的影响而产生的;本文发展了一种考虑上述诸效应的理论方法;并详细讨论该方法在元素(Cd)和合金(Al_xsn_(100-x))靶实验微分产额方面的应用。
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/11751
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
王震遐. 离子溅射的微区叠加原理[J]. 物理学报,1994(01).
APA 王震遐.(1994).离子溅射的微区叠加原理.物理学报(01).
MLA 王震遐."离子溅射的微区叠加原理".物理学报 .01(1994).
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