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碰撞能量对荷能团簇碰撞沉积TiN薄膜的结构、形貌及摩擦学特性的影响
陈景升; 俞国庆; 潘浩昌; 朱德彰; 徐洪杰; 郑志豪; 阎逢元
2000-09-10
Source Publication核技术
Issue09
Abstract在室温下;以硅(100)为衬底;在不同的衬底偏压(即团簇不同碰撞能量)的条件下;用荷能团簇碰撞沉积方法制备了TiN薄膜。用原子力显微镜和X射线衍射等技术对TiN薄膜的表面形貌和结构进行了研究;并且在维式硬度计和SRV微动摩擦磨损试验机上对其摩擦学性能进行了考察。结果表明;在低的偏压情况下;团簇比较松散地堆积在衬底上;而在高偏压时团簇和衬底碰撞破碎;形成附着力强、致密性好及表面非常光滑的薄膜;在一定的偏压范围内;TiN薄膜是(220)择优取向;TiN薄膜具有较高的硬度、较低的摩擦系数和较好的耐磨损性能。
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/11860
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
陈景升,俞国庆,潘浩昌,等. 碰撞能量对荷能团簇碰撞沉积TiN薄膜的结构、形貌及摩擦学特性的影响[J]. 核技术,2000(09).
APA 陈景升.,俞国庆.,潘浩昌.,朱德彰.,徐洪杰.,...&阎逢元.(2000).碰撞能量对荷能团簇碰撞沉积TiN薄膜的结构、形貌及摩擦学特性的影响.核技术(09).
MLA 陈景升,et al."碰撞能量对荷能团簇碰撞沉积TiN薄膜的结构、形貌及摩擦学特性的影响".核技术 .09(2000).
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