CAS OpenIR  > 中科院上海原子核所2003年前
日本基于MEMS传感器的研究进展
焦正; 吴明红
2004-01-19
Source Publication传感器世界
Issue01
Abstract本文综述了近年来日本基于MEMS的传感器在企业和高校的研究进展;简述了各类MEMS传感器的结构特点与微机械加工技术;对我国MEMS传感器的研究与发展将有很大的借鉴作用。
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/11913
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
焦正,吴明红. 日本基于MEMS传感器的研究进展[J]. 传感器世界,2004(01).
APA 焦正,&吴明红.(2004).日本基于MEMS传感器的研究进展.传感器世界(01).
MLA 焦正,et al."日本基于MEMS传感器的研究进展".传感器世界 .01(2004).
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