CAS OpenIR  > 中科院上海原子核所2003年前
三元合金Cu_(76)Ni_(15)Sn_9的离子溅射研究
王震遐; 潘冀生; 章骥平; 王传珊; 李欣年; 周树鑫; 罗文芸; 张慧明; 曾跃武; 赵烈
1994-12-30
Source Publication物理学报
Issue12
Abstract在27keVAr_+离子轰击时;用收集膜技术结合俄歇谱仪(AES);研究了三元合金Cu_(76)Ni_(15)Sn_9系统的择优溅射行为。同时使用扫描电子显微镜(SEM)与电子探针微分析(EPMA).观察了靶点表面形貌变化并测定了形貌特征微区的合金组份原子的相对百分浓度。结果表明;Cu原子较Ni原子、Ni原子较Sn原子;在所测定范围(0─60°)内择优发射。最后讨论了靶点表面形貌特征和“元素局域富集”现象对择优溅射过程的影响。
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/11923
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
王震遐,潘冀生,章骥平,等. 三元合金Cu_(76)Ni_(15)Sn_9的离子溅射研究[J]. 物理学报,1994(12).
APA 王震遐.,潘冀生.,章骥平.,王传珊.,李欣年.,...&赵烈.(1994).三元合金Cu_(76)Ni_(15)Sn_9的离子溅射研究.物理学报(12).
MLA 王震遐,et al."三元合金Cu_(76)Ni_(15)Sn_9的离子溅射研究".物理学报 .12(1994).
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