CAS OpenIR  > 中科院上海原子核所2003年前
扫描质子微探针的安装调试及象差控制
毛羽; 朱卫华; 王志山; 陈汉民; 徐建波
1993-09-28
Source Publication核技术
Issue09
Abstract讨论了扫描质子微探针(SPM)安装调试的方法;通过象差调整;提高了SPM系统的空间分辨率。该系统可提供空间分辨率为2-3μm、束流强度为100pA的3MeV H~+束和2MeV He~+束。
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/11935
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
毛羽,朱卫华,王志山,等. 扫描质子微探针的安装调试及象差控制[J]. 核技术,1993(09).
APA 毛羽,朱卫华,王志山,陈汉民,&徐建波.(1993).扫描质子微探针的安装调试及象差控制.核技术(09).
MLA 毛羽,et al."扫描质子微探针的安装调试及象差控制".核技术 .09(1993).
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