CAS OpenIR  > 中科院上海原子核所2003年前
物理溅射的Monte Carlo模拟
崔福斋; 李文治; 李恒德; 郑里平
Source Publication计算物理
Abstract模拟载能离子在固体传输及原子碰撞级联过程的Monte Carlo程序TCIS;已用于考察物理溅射问题。溅射过程中;低能原子碰撞是很重要的。因此;本文详细研究了二体碰撞计算中时间积分τ的数值大小及其对溅射计算的影响。对TCIS模拟溅射物理模型、输入参数作了介绍;并给出某些模拟研究结果。模拟程序可提供溅射的原子水平的信息;这对于开展有关机理的研究是很有用的。
Indexed ByCNKI
Funding Project原子核所项目组
Document Type期刊论文
Recommended Citation
GB/T 7714
崔福斋,李文治,李恒德,等. 物理溅射的Monte Carlo模拟[J]. 计算物理,1988(02).
APA 崔福斋,李文治,李恒德,&郑里平.(1988).物理溅射的Monte Carlo模拟.计算物理(02).
MLA 崔福斋,et al."物理溅射的Monte Carlo模拟".计算物理 .02(1988).
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