CAS OpenIR  > 中科院上海原子核所2003年前
一个短间隙离子束减速系统
陈淼; 邹志宜; 陈守信; 孙纯昌
1987
Source Publication核技术
Issue05
Abstract<正> 当今;甚低能离子束(几十ey—几个keV)在材料科学中发挥着越来越大的作用。低能离子注入和低能离子束沉积(尤其是经过质量分析的)在离子溅射等应用基础研究和各种功能膜的制备等方面有着宽广的应用前景。应用实验室电磁同位素分离器制备核物理实验用各种稳定同位素靶(几十—几百μg/cm~2的薄靶)时为了提高收集效率(要使自溅射系数小于1);也需
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/12212
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
陈淼,邹志宜,陈守信,等. 一个短间隙离子束减速系统[J]. 核技术,1987(05).
APA 陈淼,邹志宜,陈守信,&孙纯昌.(1987).一个短间隙离子束减速系统.核技术(05).
MLA 陈淼,et al."一个短间隙离子束减速系统".核技术 .05(1987).
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