油封式机械真空泵抽气过程的残气质谱分析

CAS OpenIR > 中科院上海原子核所2003年前

	油封式机械真空泵抽气过程的残气质谱分析
	林俊英; 范有裕
	1989
Source Publication	真空科学与技术
Issue	03
Abstract	<正> 一、前言对如何采取附加措施来减少油封式机械泵的返油污染;以获得清洁的预真空进行过探讨;并提供了一系列的预真空残气质谱图。如果能对油封式机械泵的全部抽气过
Indexed By	CNKI
Language	中文
Funding Project	原子核所项目组
Document Type	期刊论文
Identifier	http://ir.sinap.ac.cn/handle/331007/12363
Collection	中科院上海原子核所2003年前
Recommended Citation GB/T 7714	林俊英,范有裕. 油封式机械真空泵抽气过程的残气质谱分析[J]. 真空科学与技术,1989(03).
APA	林俊英,&范有裕.(1989).油封式机械真空泵抽气过程的残气质谱分析.真空科学与技术(03).
MLA	林俊英,et al."油封式机械真空泵抽气过程的残气质谱分析".真空科学与技术 .03(1989).

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