CAS OpenIR  > 中科院上海原子核所2003年前
油封式机械真空泵抽气过程的残气质谱分析
林俊英; 范有裕
1989
Source Publication真空科学与技术
Issue03
Abstract<正> 一、前言对如何采取附加措施来减少油封式机械泵的返油污染;以获得清洁的预真空进行过探讨;并提供了一系列的预真空残气质谱图。如果能对油封式机械泵的全部抽气过
Indexed ByCNKI
Language中文
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/12363
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
林俊英,范有裕. 油封式机械真空泵抽气过程的残气质谱分析[J]. 真空科学与技术,1989(03).
APA 林俊英,&范有裕.(1989).油封式机械真空泵抽气过程的残气质谱分析.真空科学与技术(03).
MLA 林俊英,et al."油封式机械真空泵抽气过程的残气质谱分析".真空科学与技术 .03(1989).
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