预真空的残气质谱分析

CAS OpenIR > 中科院上海原子核所2003年前

	预真空的残气质谱分析
	范有裕
	1985
Source Publication	真空科学与技术
Issue	02
Abstract	本文详细地叙述了预真空残气质谱分析的设备和方法;并且提供了一系列目前常用的预真空获得方法的残气质谱图。通过对这些残气质谱的分析和比较;可以为清洁的超高真空系统选用一种合适的预真空获得方式。
Indexed By	CNKI
Language	中文
Funding Project	原子核所项目组
Document Type	期刊论文
Identifier	http://ir.sinap.ac.cn/handle/331007/12375
Collection	中科院上海原子核所2003年前
Recommended Citation GB/T 7714	范有裕. 预真空的残气质谱分析[J]. 真空科学与技术,1985(02).
APA	范有裕.(1985).预真空的残气质谱分析.真空科学与技术(02).
MLA	范有裕."预真空的残气质谱分析".真空科学与技术 .02(1985).

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