CAS OpenIR  > 中科院上海应用物理研究所2011-2019年
扫描质子微探针质子束刻写
雷前涛; 刘江峰; 包良满; 张仲建; 余本海; 李晓林
2012
Source Publication强激光与粒子束
ISSN1001-4322
Issue7Pages:1603-1607
Abstract质子束刻写技术利用MeV能量的聚焦质子束对抗蚀剂材料直接刻写μm甚至nm尺度微结构。研究了质子束刻写中抗蚀剂胶层样品厚度与涂层机旋转速度的关系以及曝光对抗蚀剂的影响,解决了质子束刻写中抗蚀剂厚胶层样品的制备、固化、显影等技术问题,利用扫描质子微探针系统,在正型抗蚀剂胶层上刻写出μm尺度的"海宝"图形、双矩形结构,在负型抗蚀剂上刻写出μm尺度的平行线条、"十"字形微结构。
Indexed ByCNKI
Language中文
Funding Project应物所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/12786
Collection中科院上海应用物理研究所2011-2019年
Recommended Citation
GB/T 7714
雷前涛,刘江峰,包良满,等. 扫描质子微探针质子束刻写[J]. 强激光与粒子束,2012(7):1603-1607.
APA 雷前涛,刘江峰,包良满,张仲建,余本海,&李晓林.(2012).扫描质子微探针质子束刻写.强激光与粒子束(7),1603-1607.
MLA 雷前涛,et al."扫描质子微探针质子束刻写".强激光与粒子束 .7(2012):1603-1607.
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