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用于标定镀膜机的膜厚样板的制备和测量
刘一; 赵俊; 邹子英; 雷李华
2012
Source Publication工业计量
ISSN1002-1183
Issue1Pages:41402
Abstract镀膜在国民经济生活中得到广泛应用。影响镀膜性能的一个主要参数是膜层在整个基片上的厚度均匀性。利用挡板在基片上多个区域沉积台阶,测量台阶高度的差值用于分析膜厚的均匀性。通过集成非接触聚焦式测头的纳米测量机进行测量,针对镀膜产品上各个特殊的曲面台阶,以参差平方和为标准,用基底无台阶区域的曲线模型拟合台阶底部曲线,参考ISO 5436-1:2000的台阶评价方法,对镀膜基片上多台阶进行了评价。该方法可以用于镀膜机的验收。
Indexed ByCNKI
Language中文
Funding Project应物所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/12828
Collection中科院上海应用物理研究所2011-2020年
Recommended Citation
GB/T 7714
刘一,赵俊,邹子英,等. 用于标定镀膜机的膜厚样板的制备和测量[J]. 工业计量,2012(1):41402.
APA 刘一,赵俊,邹子英,&雷李华.(2012).用于标定镀膜机的膜厚样板的制备和测量.工业计量(1),41402.
MLA 刘一,et al."用于标定镀膜机的膜厚样板的制备和测量".工业计量 .1(2012):41402.
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