CAS OpenIR  > 中科院上海原子核所2003年前
A new long trace profiler for aspheric optical surface metrology
Xiao, TQ(肖体乔); Xia, SJ(夏绍健)
2002
Source PublicationOPTICAL DESIGN AND TESTING
ISSN0277-786X
Volume4927
AbstractA long trace profiler (LTP) is specially designed for the metrology of long aspheric optical surfaces and has been widely used in the fields of synchrotron radiation and astronomy. An LTP with an innovative design has been successfully developed at SSRF An f-theta system based on phase plate diffraction collimation is employed for the first time. Effect of source instability and ambient factors on the precision is greatly reduced, compared to other LTPs now available. The scanning range is 350mm, precision better than 0.5murad, static repeatability 0.1murad. The profiler has been calibrated by a standard mirror from Chinese National Institute of Metrology.
Indexed BySCI
Language英语
Funding Project原子核所项目组
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/12922
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
Xiao, TQ,Xia, SJ. A new long trace profiler for aspheric optical surface metrology[J]. OPTICAL DESIGN AND TESTING,2002,4927.
APA Xiao, TQ,&Xia, SJ.(2002).A new long trace profiler for aspheric optical surface metrology.OPTICAL DESIGN AND TESTING,4927.
MLA Xiao, TQ,et al."A new long trace profiler for aspheric optical surface metrology".OPTICAL DESIGN AND TESTING 4927(2002).
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