CAS OpenIR  > 中科院上海原子核所2003年前
AS REDISTRIBUTION DURING TI SILICIDE FORMATION
YU, N; ZHOU, ZY; ZHOU, W; TSOU, SC; ZHU, DZ(朱德彰)
1987
Source PublicationNUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN0168-583X
Volume41324
Indexed BySCI
Language英语
Funding Project原子核所项目组
WOS IDWOS:A1987G385900081
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/12929
Collection中科院上海原子核所2003年前
Recommended Citation
GB/T 7714
YU, N,ZHOU, ZY,ZHOU, W,et al. AS REDISTRIBUTION DURING TI SILICIDE FORMATION[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1987,41324.
APA YU, N,ZHOU, ZY,ZHOU, W,TSOU, SC,&ZHU, DZ.(1987).AS REDISTRIBUTION DURING TI SILICIDE FORMATION.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,41324.
MLA YU, N,et al."AS REDISTRIBUTION DURING TI SILICIDE FORMATION".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 41324(1987).
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