Knowledge Management System Of Shanghai Institute of Applied Physics, CAS
| FORMATION OF TITANIUM SILICIDE AND SHALLOW JUNCTIONS BY BF2+ IMPLANTATION AND LOW-TEMPERATURE ANNEALING | |
| ZHU, DZ（朱德彰）; PAN, HC; ZHU, FY（朱福英）; CAO, JQ（曹建清）; CAO, DX（曹德新） | |
| 1989 | |
| Source Publication | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| ISSN | 0168-583X |
| Volume | 39Issue:41278 |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 原子核所项目组 |
| WOS ID | WOS:A1989T863200062 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.sinap.ac.cn/handle/331007/12948 |
| Collection | 中科院上海原子核所2003年前 |
| Recommended Citation GB/T 7714 | ZHU, DZ,PAN, HC,ZHU, FY,et al. FORMATION OF TITANIUM SILICIDE AND SHALLOW JUNCTIONS BY BF2+ IMPLANTATION AND LOW-TEMPERATURE ANNEALING[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1989,39(41278). |
| APA | ZHU, DZ,PAN, HC,ZHU, FY,CAO, JQ,&CAO, DX.(1989).FORMATION OF TITANIUM SILICIDE AND SHALLOW JUNCTIONS BY BF2+ IMPLANTATION AND LOW-TEMPERATURE ANNEALING.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,39(41278). |
| MLA | ZHU, DZ,et al."FORMATION OF TITANIUM SILICIDE AND SHALLOW JUNCTIONS BY BF2+ IMPLANTATION AND LOW-TEMPERATURE ANNEALING".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 39.41278(1989). |
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