Knowledge Management System Of Shanghai Institute of Applied Physics, CAS
FORMATION OF TITANIUM SILICIDE AND SHALLOW JUNCTIONS BY BF2+ IMPLANTATION AND LOW-TEMPERATURE ANNEALING | |
ZHU, DZ(朱德彰); PAN, HC; ZHU, FY(朱福英); CAO, JQ(曹建清); CAO, DX(曹德新) | |
1989 | |
Source Publication | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
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ISSN | 0168-583X |
Volume | 39Issue:41278 |
Indexed By | SCI |
Language | 英语 |
Funding Project | 原子核所项目组 |
WOS ID | WOS:A1989T863200062 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.sinap.ac.cn/handle/331007/12948 |
Collection | 中科院上海原子核所2003年前 |
Recommended Citation GB/T 7714 | ZHU, DZ,PAN, HC,ZHU, FY,et al. FORMATION OF TITANIUM SILICIDE AND SHALLOW JUNCTIONS BY BF2+ IMPLANTATION AND LOW-TEMPERATURE ANNEALING[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1989,39(41278). |
APA | ZHU, DZ,PAN, HC,ZHU, FY,CAO, JQ,&CAO, DX.(1989).FORMATION OF TITANIUM SILICIDE AND SHALLOW JUNCTIONS BY BF2+ IMPLANTATION AND LOW-TEMPERATURE ANNEALING.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,39(41278). |
MLA | ZHU, DZ,et al."FORMATION OF TITANIUM SILICIDE AND SHALLOW JUNCTIONS BY BF2+ IMPLANTATION AND LOW-TEMPERATURE ANNEALING".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 39.41278(1989). |
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