CAS OpenIR  > 中科院上海应用物理研究所2011-2019年
Correlation between diamond grain size and hydrogen incorporation in nanocrystalline diamond thin films
Rakha, SA; Yu, GJ(俞国军); Cao, JQ(曹建清)
2012
Source PublicationJOURNAL OF EXPERIMENTAL NANOSCIENCE
ISSN1745-8080
Volume7Issue:4
AbstractHydrogen-incorporated nanocrystalline diamond thin films have been deposited in microwave plasma enhanced chemical vapour deposition (CVD) system with various hydrogen concentrations in the Ar/CH4 gas mixture. The bonding environment of carbon atoms was detected by Raman spectroscopy and the hydrogen concentration was determined by elastic recoil detection analysis. Incorporation of H-2 species into Ar-rich plasma was observed to markedly alter the microstructure of diamond films. Raman spectroscopy results showed that part of the hydrogen is bonded to carbon atoms. Raman spectra also indicated the increase of non-diamond phase with the decrease in crystallite size. The study addresses the effects of hydrogen trapping in the samples when hydrogen concentration in the plasma increased during diamond growth and its relation with defective grain boundary region.
Language英语
Funding Project应物所项目组
WOS IDWOS:000305559500003
Citation statistics
Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/13110
Collection中科院上海应用物理研究所2011-2019年
Recommended Citation
GB/T 7714
Rakha, SA,Yu, GJ,Cao, JQ. Correlation between diamond grain size and hydrogen incorporation in nanocrystalline diamond thin films[J]. JOURNAL OF EXPERIMENTAL NANOSCIENCE,2012,7(4).
APA Rakha, SA,Yu, GJ,&Cao, JQ.(2012).Correlation between diamond grain size and hydrogen incorporation in nanocrystalline diamond thin films.JOURNAL OF EXPERIMENTAL NANOSCIENCE,7(4).
MLA Rakha, SA,et al."Correlation between diamond grain size and hydrogen incorporation in nanocrystalline diamond thin films".JOURNAL OF EXPERIMENTAL NANOSCIENCE 7.4(2012).
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