Knowledge Management System Of Shanghai Institute of Applied Physics, CAS
| Correlation between diamond grain size and hydrogen incorporation in nanocrystalline diamond thin films | |
| Rakha, SA; Yu, GJ（俞国军）; Cao, JQ（曹建清） | |
| 2012 | |
| Source Publication | JOURNAL OF EXPERIMENTAL NANOSCIENCE
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| ISSN | 1745-8080 |
| Volume | 7Issue:4 |
| Abstract | Hydrogen-incorporated nanocrystalline diamond thin films have been deposited in microwave plasma enhanced chemical vapour deposition (CVD) system with various hydrogen concentrations in the Ar/CH4 gas mixture. The bonding environment of carbon atoms was detected by Raman spectroscopy and the hydrogen concentration was determined by elastic recoil detection analysis. Incorporation of H-2 species into Ar-rich plasma was observed to markedly alter the microstructure of diamond films. Raman spectroscopy results showed that part of the hydrogen is bonded to carbon atoms. Raman spectra also indicated the increase of non-diamond phase with the decrease in crystallite size. The study addresses the effects of hydrogen trapping in the samples when hydrogen concentration in the plasma increased during diamond growth and its relation with defective grain boundary region. |
| Language | 英语 |
| Funding Project | 应物所项目组 |
| WOS ID | WOS:000305559500003 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.sinap.ac.cn/handle/331007/13110 |
| Collection | 中科院上海应用物理研究所2011-2020年 |
| Recommended Citation GB/T 7714 | Rakha, SA,Yu, GJ,Cao, JQ. Correlation between diamond grain size and hydrogen incorporation in nanocrystalline diamond thin films[J]. JOURNAL OF EXPERIMENTAL NANOSCIENCE,2012,7(4). |
| APA | Rakha, SA,Yu, GJ,&Cao, JQ.(2012).Correlation between diamond grain size and hydrogen incorporation in nanocrystalline diamond thin films.JOURNAL OF EXPERIMENTAL NANOSCIENCE,7(4). |
| MLA | Rakha, SA,et al."Correlation between diamond grain size and hydrogen incorporation in nanocrystalline diamond thin films".JOURNAL OF EXPERIMENTAL NANOSCIENCE 7.4(2012). |
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