CAS OpenIR  > 中科院上海应用物理研究所2011-2019年
Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens
Huang Qiu-Shi; Li Hao-Chuan; Song Zhu-Qing; Zhu Jing-Tao; Wang Zhan-Shan; Li Ai-Guo(李爱国); Yan Shuai(闫帅); Mao Cheng-Wen(毛成文); Wang Hua(王华); Yan Fen(闫芬); Zhang Ling; Yu Xiao-Han(余笑寒); Liu Peng; Li Ming
2013
Source PublicationCHINESE PHYSICS C
ISSN1674-1137
Volume37Issue:2
AbstractThe multilayer Laue lens (MLL) is a novel diffraction optics which can realize nanometer focusing of hard X-rays with high efficiency. In this paper, a 7.9 mu m-thick MLL with the outmost layer thickness of 15 nm is designed based on dynamical diffraction theory. The MLL is fabricated by first depositing the depth-graded multilayer using direct current (DC) magnetron sputtering technology. Then, the multilayer sample is sliced, and both cross-sections are thinned and polished to a depth of 35-41 mu m. The focusing property of the MLL is measured at the Shanghai Synchrotron Facility (SSRF). One-dimensional (1D) focusing resolutions of 205 nm and 221 nm are obtained at E=14 keV and 18 keV, respectively. It demonstrates that the fabricated MLL can focus hard X-rays into nanometer scale.
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000320547600018
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/13764
Collection中科院上海应用物理研究所2011-2019年
Recommended Citation
GB/T 7714
Huang Qiu-Shi,Li Hao-Chuan,Song Zhu-Qing,et al. Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens[J]. CHINESE PHYSICS C,2013,37(2).
APA Huang Qiu-Shi.,Li Hao-Chuan.,Song Zhu-Qing.,Zhu Jing-Tao.,Wang Zhan-Shan.,...&Li Ming.(2013).Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens.CHINESE PHYSICS C,37(2).
MLA Huang Qiu-Shi,et al."Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens".CHINESE PHYSICS C 37.2(2013).
Files in This Item: Download All
File Name/Size DocType Version Access License
Hard X-ray one dimen(544KB) 开放获取CC BY-NC-SAView Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Huang Qiu-Shi]'s Articles
[Li Hao-Chuan]'s Articles
[Song Zhu-Qing]'s Articles
Baidu academic
Similar articles in Baidu academic
[Huang Qiu-Shi]'s Articles
[Li Hao-Chuan]'s Articles
[Song Zhu-Qing]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Huang Qiu-Shi]'s Articles
[Li Hao-Chuan]'s Articles
[Song Zhu-Qing]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2-Si multilayer Laue lens.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.