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Interface characterization of B4C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering
Jiang, Hui; Wang, Zhanshan; Zhu, Jingtao
2013
Source PublicationJOURNAL OF SYNCHROTRON RADIATION
ISSN0909-0495
Volume20Pages:CONCATENATE(Sheet1!I175,-Sheet1!J175)
AbstractB4C-based multilayers have important applications for soft to hard X-rays. In this paper, X-ray grazing-incidence reflectivity and diffuse scattering, combining various analysis methods, were used to characterize the structure of B4C-based multilayers including layer thickness, density, interfacial roughness, interdiffusion, correlation length, etc. Quantitative results for W/B4C, Mo/B4C and La/B4C multilayers were compared. W/B4C multilayers show the sharpest interfaces and most stable structures. The roughness replications of La/B4C and Mo/B4C multilayers are not strong, and oxidations and structure expansions are found in the aging process. This work provides guidance for future fabrication and characterization of B4C-based multilayers.
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000317604800008
Citation statistics
Cited Times:7[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/13788
Collection中科院上海应用物理研究所2011-2019年
Recommended Citation
GB/T 7714
Jiang, Hui,Wang, Zhanshan,Zhu, Jingtao. Interface characterization of B4C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering[J]. JOURNAL OF SYNCHROTRON RADIATION,2013,20:CONCATENATE(Sheet1!I175,-Sheet1!J175).
APA Jiang, Hui,Wang, Zhanshan,&Zhu, Jingtao.(2013).Interface characterization of B4C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering.JOURNAL OF SYNCHROTRON RADIATION,20,CONCATENATE(Sheet1!I175,-Sheet1!J175).
MLA Jiang, Hui,et al."Interface characterization of B4C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering".JOURNAL OF SYNCHROTRON RADIATION 20(2013):CONCATENATE(Sheet1!I175,-Sheet1!J175).
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