CAS OpenIR  > 中科院上海应用物理研究所2011-2019年
Robust design of broadband EUV multilayer beam splitters based on particle swarm optimization
Jiang, Hui; Michette, Alan G.
2013
Source PublicationNUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
ISSN0168-9002
Volume703Pages:CONCATENATE(Sheet1!I284,-Sheet1!J284)
AbstractA robust design idea for broadband EUV multilayer beam splitters is introduced that achieves the aim of decreasing the influence of layer thickness errors on optical performances. Such beam splitters can be used in interferometry to determine the quality of EUVL masks by comparing with a reference multilayer. In the optimization, particle swarm techniques were used for the first time in such designs. Compared to conventional genetic algorithms, particle swarm optimization has stronger ergodicity, simpler processing and faster convergence. (C) 2012 Elsevier B.V. All rights reserved.
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000314683700005
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/13887
Collection中科院上海应用物理研究所2011-2019年
Recommended Citation
GB/T 7714
Jiang, Hui,Michette, Alan G.. Robust design of broadband EUV multilayer beam splitters based on particle swarm optimization[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT,2013,703:CONCATENATE(Sheet1!I284,-Sheet1!J284).
APA Jiang, Hui,&Michette, Alan G..(2013).Robust design of broadband EUV multilayer beam splitters based on particle swarm optimization.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT,703,CONCATENATE(Sheet1!I284,-Sheet1!J284).
MLA Jiang, Hui,et al."Robust design of broadband EUV multilayer beam splitters based on particle swarm optimization".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT 703(2013):CONCATENATE(Sheet1!I284,-Sheet1!J284).
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