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Substrate surface effect on the structure of cubic BN thin films from synchrotron-based X-ray diffraction and reflection
Zhang, X. M.; Wen, W.; Li, X. L.; He, Q.; Zhou, X. T.
2013
Source PublicationAPPLIED SURFACE SCIENCE
ISSN0169-4332
Volume266Pages:CONCATENATE(Sheet1!I337,-Sheet1!J337)
AbstractCubic BN (cBN) thin films prepared by mass-selected ion beam deposition technique (MSIBD) on Si substrates with different surface roughness were studied by synchrotron-based grazing incidence X-ray diffraction (GI-XRD) and X-ray reflectivity (XRR) measurements. The BN films are mostly composed of two phases. One is cBN phase, the other is hexagonal BN (hBN) phase. The cubic phase content of the thin films is dependent on the roughness of their corresponding substrates. The smooth substrate surface is helpful for the nucleation of the cBN phase. cBN phase is mostly grown in the near surface region of the films and there is a hBN interlayer at the film-substrate interface. GIXRD and XRR are proved to be powerful tools for analyzing the structure of the cBN thin films. (C) 2012 Elsevier B.V. All rights reserved.
Indexed BySCI
Language英语
Funding Project应物所项目组
WOS IDWOS:000314021100011
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/13935
Collection中科院上海应用物理研究所2011-2020年
Recommended Citation
GB/T 7714
Zhang, X. M.,Wen, W.,Li, X. L.,et al. Substrate surface effect on the structure of cubic BN thin films from synchrotron-based X-ray diffraction and reflection[J]. APPLIED SURFACE SCIENCE,2013,266:CONCATENATE(Sheet1!I337,-Sheet1!J337).
APA Zhang, X. M.,Wen, W.,Li, X. L.,He, Q.,&Zhou, X. T..(2013).Substrate surface effect on the structure of cubic BN thin films from synchrotron-based X-ray diffraction and reflection.APPLIED SURFACE SCIENCE,266,CONCATENATE(Sheet1!I337,-Sheet1!J337).
MLA Zhang, X. M.,et al."Substrate surface effect on the structure of cubic BN thin films from synchrotron-based X-ray diffraction and reflection".APPLIED SURFACE SCIENCE 266(2013):CONCATENATE(Sheet1!I337,-Sheet1!J337).
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