CAS OpenIR  > 中科院上海应用物理研究所2011-2019年
Integration method for directly analyzing interface statistics of periodic multilayers from X-ray scattering
Li, HC; Zhu, JT; Wang, ZS; Chen, H; Wang, YZ; Wang, J; jtzhu@tongji.edu.cn
2014
Source PublicationJOURNAL OF SYNCHROTRON RADIATION
ISSN0909-0495
Volume21Pages:97—103
AbstractAn integration method is demonstrated for directly determining the average interface statistics of periodic multilayers from the X-ray scattering diagram. By measuring the X-ray scattering diagram in the out-of-plane geometry and integrating the scattered intensity along the vertical momentum transfer q(z) in an interval, which is decided by the thickness ratio Gamma (ratio of sublayer's thickness to periodic thickness), the cross-correlations between different interfaces are canceled and only the autocorrelations are reserved. Then the multilayer can be treated as a 'single interface' and the average power spectral density can be obtained without assuming any vertical correlation model. This method has been employed to study the interface morphology of sputter-deposited W/Si multilayers grown at an Ar pressure of 1-7 mTorr. The results show an increase in vertical correlation length and a decrease in lateral correlation length with increased Ar pressure. The static roughness exponent alpha = 0 and dynamic growth exponent z = 2 indicate the Edwards-Wilkinson growth model at an Ar pressure of 1-5 mTorr. At an Ar pressure of 7 mTorr, alpha = 0.35 and z = 1.65 indicate the Kardar-Parisi-Zhang growth model.
KeywordSputtering Pressure Diffuse-scattering Roughness Performance Surface Film
Indexed BySCI
Language英语
WOS IDWOS:000328939400012
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/14199
Collection中科院上海应用物理研究所2011-2019年
Corresponding Authorjtzhu@tongji.edu.cn
Recommended Citation
GB/T 7714
Li, HC,Zhu, JT,Wang, ZS,et al. Integration method for directly analyzing interface statistics of periodic multilayers from X-ray scattering[J]. JOURNAL OF SYNCHROTRON RADIATION,2014,21:97—103.
APA Li, HC.,Zhu, JT.,Wang, ZS.,Chen, H.,Wang, YZ.,...&jtzhu@tongji.edu.cn.(2014).Integration method for directly analyzing interface statistics of periodic multilayers from X-ray scattering.JOURNAL OF SYNCHROTRON RADIATION,21,97—103.
MLA Li, HC,et al."Integration method for directly analyzing interface statistics of periodic multilayers from X-ray scattering".JOURNAL OF SYNCHROTRON RADIATION 21(2014):97—103.
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