Development of XUV multilayer gratings with high resolution and high efficiency

CAS OpenIR > 中科院上海应用物理研究所2011-2018年

	Development of XUV multilayer gratings with high resolution and high efficiency
	Yang, XW; Huang, QS; Kozhevnikov, IV; Wang, ZS; Zhao, J; Wu, YQ; Yang, XW (reprint author), Tongji Univ, Sch Phys Sci & Engn, Inst Precis Opt Engn, MOE Key Lab Adv Micro Struct Mat, Shanghai 200092, Peoples R China.
	2015
会议名称	Conference on EUV and X-ray Optics - Synergy between Laboratory and Space IV
会议日期	APR 13-14, 2015
会议地点	Prague, CZECH REPUBLIC
摘要	We present a short review of our activities carried out in Tongji University (Shanghai, China) in the field of theory and technology of soft X-ray multilayer diffraction gratings. Diffraction gratings are widely used to study the structure and dynamics of a matter in laboratory and space by spectral analysis techniques. Combining multilayer and grating structures into a single unit allows to increase essentially both the spectral resolution and the efficiency of the diffraction optics. The unified analytical theory of soft X-ray diffraction from multilayer gratings operating in the single-order regime is briefly discussed. The single-order regime occurs when incident wave excites the only diffraction order and it is characterized by ultimately high diffraction efficiency tending to the reflectivity of conventional multilayer mirror. Our first experiments in fabrication of the blazed multilayer gratings by anisotropic etching of a silicon crystal with small roughness of the facet surfaces are described.
ISSN	0277-786X
ISBN	978-1-62841-631-2
文章类型	会议文献
关键词	Diffraction Efficiency Enhancement Wavelength Operation
收录类别	SCI
语种	英语
文献类型	会议论文
条目标识符	http://ir.sinap.ac.cn/handle/331007/25101
专题	中科院上海应用物理研究所2011-2018年
通讯作者	Yang, XW (reprint author), Tongji Univ, Sch Phys Sci & Engn, Inst Precis Opt Engn, MOE Key Lab Adv Micro Struct Mat, Shanghai 200092, Peoples R China.
推荐引用方式 GB/T 7714	Yang, XW,Huang, QS,Kozhevnikov, IV,et al. Development of XUV multilayer gratings with high resolution and high efficiency[C],2015.

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