Knowledge Management System Of Shanghai Institute of Applied Physics, CAS
| Development of XUV multilayer gratings with high resolution and high efficiency | |
| Yang, XW; Huang, QS; Kozhevnikov, IV; Wang, ZS; Zhao, J; Wu, YQ; Yang, XW (reprint author), Tongji Univ, Sch Phys Sci & Engn, Inst Precis Opt Engn, MOE Key Lab Adv Micro Struct Mat, Shanghai 200092, Peoples R China. | |
| 2015 | |
| Conference Name | Conference on EUV and X-ray Optics - Synergy between Laboratory and Space IV |
| Conference Date | APR 13-14, 2015 |
| Conference Place | Prague, CZECH REPUBLIC |
| Abstract | We present a short review of our activities carried out in Tongji University (Shanghai, China) in the field of theory and technology of soft X-ray multilayer diffraction gratings. Diffraction gratings are widely used to study the structure and dynamics of a matter in laboratory and space by spectral analysis techniques. Combining multilayer and grating structures into a single unit allows to increase essentially both the spectral resolution and the efficiency of the diffraction optics. The unified analytical theory of soft X-ray diffraction from multilayer gratings operating in the single-order regime is briefly discussed. The single-order regime occurs when incident wave excites the only diffraction order and it is characterized by ultimately high diffraction efficiency tending to the reflectivity of conventional multilayer mirror. Our first experiments in fabrication of the blazed multilayer gratings by anisotropic etching of a silicon crystal with small roughness of the facet surfaces are described. |
| ISSN | 0277-786X |
| ISBN | 978-1-62841-631-2 |
| Subtype | 会议文献 |
| Keyword | Diffraction Efficiency Enhancement Wavelength Operation |
| Indexed By | SCI |
| Language | 英语 |
| Document Type | 会议论文 |
| Identifier | http://ir.sinap.ac.cn/handle/331007/25101 |
| Collection | 中科院上海应用物理研究所2011-2020年 |
| Corresponding Author | Yang, XW (reprint author), Tongji Univ, Sch Phys Sci & Engn, Inst Precis Opt Engn, MOE Key Lab Adv Micro Struct Mat, Shanghai 200092, Peoples R China. |
| Recommended Citation GB/T 7714 | Yang, XW,Huang, QS,Kozhevnikov, IV,et al. Development of XUV multilayer gratings with high resolution and high efficiency[C],2015. |
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| Development of XUV m（723KB） | 会议论文 | 开放获取 | CC BY-NC-SA | View Download | ||
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