Nano-accuracy measurement technology of optical-surface profiles

CAS OpenIR > 中科院上海应用物理研究所2011-2019年

	Nano-accuracy measurement technology of optical-surface profiles
	Qian, SN; Gao, B; Qian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA.
	2016
Conference Name	8th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics
Conference Date	APR 26-29, 2016
Conference Place	Suzhou, PEOPLES R CHINA
Funding Organization	Chinese Opt Soc, Chinese Acad Sci, Inst Opt & Elect, SPIE
ISSN	0277-786X
ISBN	978-1-62841-922-1
Subtype	会议论文
Keyword	Surface Profiler Profilometer Nano-accuracy Preccise Measurement
DOI	10.1117/12.2247578
Indexed By	SCI
Language	英语
Citation statistics	Cited Times:3[WOS] [WOS Record] [Related Records in WOS]
Document Type	会议论文
Identifier	http://ir.sinap.ac.cn/handle/331007/26393
Collection	中科院上海应用物理研究所2011-2019年
Corresponding Author	Qian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA.
Recommended Citation GB/T 7714	Qian, SN,Gao, B,Qian, SN . Nano-accuracy measurement technology of optical-surface profiles[C],2016.

Related Services

Bookmark

Google Scholar

Similar articles in Bing Scholar

Terms of Use

No data!

Social Bookmark/Share

File name:	Nano-accuracy measurement technology of optical-surface profiles.pdf
Format:	Adobe PDF

All comments (0)

No comment.

The comment function is only available to registered usersLog In

If you have any objections to this item, please fill out the form below and the administrator will contact you as soon as possible.
Content:
Email：	*
Institution:
Verification Code:	Refresh

Any comments and suggestions are welcomed.
Title:	*
Content:
Email：	*
Verification Code:	Refresh

中国科学院上海应用物理研究所机构知识库