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Nano-accuracy measurement technology of optical-surface profiles | |
Qian, SN; Gao, B; Qian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA. | |
2016 | |
Conference Name | 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics |
Conference Date | APR 26-29, 2016 |
Conference Place | Suzhou, PEOPLES R CHINA |
Funding Organization | Chinese Opt Soc, Chinese Acad Sci, Inst Opt & Elect, SPIE |
ISSN | 0277-786X |
ISBN | 978-1-62841-922-1 |
Subtype | 会议论文 |
Keyword | Surface Profiler Profilometer Nano-accuracy Preccise Measurement |
DOI | 10.1117/12.2247578 |
Indexed By | SCI |
Language | 英语 |
Citation statistics | |
Document Type | 会议论文 |
Identifier | http://ir.sinap.ac.cn/handle/331007/26393 |
Collection | 中科院上海应用物理研究所2011-2020年 |
Corresponding Author | Qian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA. |
Recommended Citation GB/T 7714 | Qian, SN,Gao, B,Qian, SN . Nano-accuracy measurement technology of optical-surface profiles[C],2016. |
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Nano-accuracy measur(773KB) | 会议论文 | 开放获取 | CC BY-NC-SA | View Download |
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