Nano-accuracy measurement technology of optical-surface profiles

CAS OpenIR > 中科院上海应用物理研究所2011-2020年

	Nano-accuracy measurement technology of optical-surface profiles
	Qian, SN; Gao, B; Qian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA.
	2016
Conference Name	8th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics
Conference Date	APR 26-29, 2016
Conference Place	Suzhou, PEOPLES R CHINA
Funding Organization	Chinese Opt Soc, Chinese Acad Sci, Inst Opt & Elect, SPIE
ISSN	0277-786X
ISBN	978-1-62841-922-1
Subtype	会议论文
Keyword	Surface Profiler Profilometer Nano-accuracy Preccise Measurement
DOI	10.1117/12.2247578
Indexed By	SCI
Language	英语
Citation statistics	Cited Times:3[WOS] [WOS Record] [Related Records in WOS]
Document Type	会议论文
Identifier	http://ir.sinap.ac.cn/handle/331007/26393
Collection	中科院上海应用物理研究所2011-2020年
Corresponding Author	Qian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA.
Recommended Citation GB/T 7714	Qian, SN,Gao, B,Qian, SN . Nano-accuracy measurement technology of optical-surface profiles[C],2016.

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