Nano-accuracy measurement technology of optical-surface profiles

CAS OpenIR > 中科院上海应用物理研究所2011-2018年

	Nano-accuracy measurement technology of optical-surface profiles
	Qian, SN; Gao, B; Qian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA.
	2016
会议名称	8th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics
会议日期	APR 26-29, 2016
会议地点	Suzhou, PEOPLES R CHINA
会议主办者	Chinese Opt Soc, Chinese Acad Sci, Inst Opt & Elect, SPIE
ISSN	0277-786X
ISBN	978-1-62841-922-1
文章类型	会议论文
关键词	Surface Profiler Profilometer Nano-accuracy Preccise Measurement
DOI	10.1117/12.2247578
收录类别	SCI
语种	英语
引用统计
文献类型	会议论文
条目标识符	http://ir.sinap.ac.cn/handle/331007/26393
专题	中科院上海应用物理研究所2011-2018年
通讯作者	Qian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA.
推荐引用方式 GB/T 7714	Qian, SN,Gao, B,Qian, SN . Nano-accuracy measurement technology of optical-surface profiles[C],2016.