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题名: Nano-accuracy measurement technology of optical-surface profiles
作者: Qian, SN; Gao, B
出版日期: 2016
会议名称: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics
会议日期: APR 26-29, 2016
会议地点: Suzhou, PEOPLES R CHINA
关键词: surface profiler ; profilometer ; nano-accuracy ; preccise measurement
DOI: 10.1117/12.2247578
通讯作者: Qian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA.
收录类别: SCI
会议主办者: Chinese Opt Soc, Chinese Acad Sci, Inst Opt & Elect, SPIE
ISSN: 0277-786X
ISBN: 978-1-62841-922-1
文章类型: 会议论文
语种: 英语
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内容类型: 会议论文
URI标识: http://ir.sinap.ac.cn/handle/331007/26393
Appears in Collections:中科院上海应用物理研究所2011-2017年_会议论文

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