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| 题名: | Nano-accuracy measurement technology of optical-surface profiles |
| 作者: | Qian, SN; Gao, B
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| 出版日期: | 2016
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| 会议名称: | 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics
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| 会议日期: | APR 26-29, 2016
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| 会议地点: | Suzhou, PEOPLES R CHINA
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| 关键词: | surface profiler
; profilometer
; nano-accuracy
; preccise measurement
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| DOI: | 10.1117/12.2247578
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| 通讯作者: | Qian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA.
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| 收录类别: | SCI
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| 会议主办者: | Chinese Opt Soc, Chinese Acad Sci, Inst Opt & Elect, SPIE
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| ISSN: | 0277-786X
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| ISBN: | 978-1-62841-922-1
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| 文章类型: | 会议论文
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| 语种: | 英语
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| Citation statistics: |
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| 内容类型: | 会议论文
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| URI标识: | http://ir.sinap.ac.cn/handle/331007/26393
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| Appears in Collections: | 中科院上海应用物理研究所2011-2017年_会议论文
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