CAS OpenIR  > 中科院上海应用物理研究所2011-2018年
Nano-accuracy measurement technology of optical-surface profiles
Qian, SN; Gao, B; Qian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA.
2016
Conference Name8th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics
Conference DateAPR 26-29, 2016
Conference PlaceSuzhou, PEOPLES R CHINA
Funding OrganizationChinese Opt Soc, Chinese Acad Sci, Inst Opt & Elect, SPIE
ISSN0277-786X
ISBN978-1-62841-922-1
Subtype会议论文
KeywordSurface Profiler Profilometer Nano-accuracy Preccise Measurement
DOI10.1117/12.2247578
Indexed BySCI
Language英语
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Document Type会议论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/26393
Collection中科院上海应用物理研究所2011-2018年
Corresponding AuthorQian, SN (reprint author), Brookhaven Natl Lab, Upton, NY 11973 USA.
Recommended Citation
GB/T 7714
Qian, SN,Gao, B,Qian, SN . Nano-accuracy measurement technology of optical-surface profiles[C],2016.
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