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题名: Full-field x ray nano-imaging system designed and constructed at SSRF
作者: Feng, BG; Deng, B; Ren, YQ; Wang, YD; Du, GH; Tan, H; Xue, YL; Xiao, TQ
刊名: CHINESE OPTICS LETTERS
出版日期: 2016
卷号: 14, 期号:9, 页码:-
DOI: 10.3788/COL201614.093401
通讯作者: Deng, B (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China.
文章类型: 期刊论文
英文摘要: Full-field x ray nano-imaging (FXNI) is one of the most powerful tools for in-situ, non-destructive observation of the inner structure of samples at the nanoscale. Owing to the high flux density of the third-generation synchrotron radiation facility, great progress is achieved for FXNI and its applications. Up to now, a spatial resolution of 20 nm for FXNI is achieved. Based on the user operation experiences over the years at the Shanghai Synchrotron Radiation Facility (SSRF) x ray imaging beamline, we know lots of user experiments will rely on a large range of spatial resolutions and fields of view (FOVs). In particular, x ray microscopes with a large FOV and a moderate spatial resolution of around 100 nm have a wide range of applications in many research fields. Driven by user requirements, a dedicated FXNI system is designed and constructed at the SSRF. This microscope is based on a beam shaper and a zone plate, with the optimized working energy range set to 8-10 keV. The experimental test results by a Siemens star pattern demonstrate that a spatial resolution of 100 nm is achieved, while an FOV of 50 mu m is obtained.
收录类别: SCI
语种: 英语
WOS记录号: WOS:000384516200018
ISSN号: 1671-7694
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.sinap.ac.cn/handle/331007/26518
Appears in Collections:中科院上海应用物理研究所2011-2017年_期刊论文

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