Full-field x ray nano-imaging system designed and constructed at SSRF
Feng, BG; Deng, B; Ren, YQ; Wang, YD; Du, GH; Tan, H; Xue, YL; Xiao, TQ; Deng, B (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China.
2016
发表期刊CHINESE OPTICS LETTERS
ISSN1671-7694
卷号14期号:9页码:-
文章类型期刊论文
摘要Full-field x ray nano-imaging (FXNI) is one of the most powerful tools for in-situ, non-destructive observation of the inner structure of samples at the nanoscale. Owing to the high flux density of the third-generation synchrotron radiation facility, great progress is achieved for FXNI and its applications. Up to now, a spatial resolution of 20 nm for FXNI is achieved. Based on the user operation experiences over the years at the Shanghai Synchrotron Radiation Facility (SSRF) x ray imaging beamline, we know lots of user experiments will rely on a large range of spatial resolutions and fields of view (FOVs). In particular, x ray microscopes with a large FOV and a moderate spatial resolution of around 100 nm have a wide range of applications in many research fields. Driven by user requirements, a dedicated FXNI system is designed and constructed at the SSRF. This microscope is based on a beam shaper and a zone plate, with the optimized working energy range set to 8-10 keV. The experimental test results by a Siemens star pattern demonstrate that a spatial resolution of 100 nm is achieved, while an FOV of 50 mu m is obtained.
DOI10.3788/COL201614.093401
收录类别SCI
语种英语
WOS记录号WOS:000384516200018
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被引频次:6[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.sinap.ac.cn/handle/331007/26518
专题中科院上海应用物理研究所2011-2018年
通讯作者Deng, B (reprint author), Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China.
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Feng, BG,Deng, B,Ren, YQ,et al. Full-field x ray nano-imaging system designed and constructed at SSRF[J]. CHINESE OPTICS LETTERS,2016,14(9):-.
APA Feng, BG.,Deng, B.,Ren, YQ.,Wang, YD.,Du, GH.,...&Deng, B .(2016).Full-field x ray nano-imaging system designed and constructed at SSRF.CHINESE OPTICS LETTERS,14(9),-.
MLA Feng, BG,et al."Full-field x ray nano-imaging system designed and constructed at SSRF".CHINESE OPTICS LETTERS 14.9(2016):-.
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