Investigation of the damage behavior in CVD SiC irradiated with 70 keV He ions by NEXAFS, Raman and TEM
Liu, M; Yang, XM; Gao, YT; Liu, RD; Huang, HF; Zhou, XT; Sham, TK
2017
发表期刊JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
ISSN0955-2219
卷号37期号:4页码:1253-1259
文章类型期刊论文
摘要Chemical vapor deposited (CVD) SiC was irradiated with 70 keV He ions at room temperature. The damage behavior was investigated by near edge X-ray absorption fine structure (NEXAFS) spectroscopy, Raman spectroscopy and transmission electron microscopy (TEM). NEXAFS spectra at the Si K-edge display the obvious decrease in intensity of crystalline peaks and near disappearance of the peak at 1852 eV, suggesting an increase in crystalline disorder resulting from an increased number of Si vacancies caused by irradiation. Raman spectra show the decomposition of crystalline Si-C bonds and the formation of homonuclear (Si-Si and C-C) bonds during irradiation. TEM results show the transition from slight disorder to full amorphization with increasing dose. The dose to amorphization (DTA) is estimated to be about 1 dpa. It is also found that high density of stacking faults in CVD SiC may contribute to the enhancement of amorphization resistance compared to single crystal beta-SiC. (C) 2016 Elsevier Ltd. All rights reserved.
关键词Nexafs Raman Irradiation Amorphization Stacking Faults
DOI10.1016/j.jeurceramsoc.2016.11.046
收录类别SCI
语种英语
WOS记录号WOS:000394482700011
引用统计
被引频次:3[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.sinap.ac.cn/handle/331007/27360
专题中科院上海应用物理研究所2011-2018年
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Liu, M,Yang, XM,Gao, YT,et al. Investigation of the damage behavior in CVD SiC irradiated with 70 keV He ions by NEXAFS, Raman and TEM[J]. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY,2017,37(4):1253-1259.
APA Liu, M.,Yang, XM.,Gao, YT.,Liu, RD.,Huang, HF.,...&Sham, TK.(2017).Investigation of the damage behavior in CVD SiC irradiated with 70 keV He ions by NEXAFS, Raman and TEM.JOURNAL OF THE EUROPEAN CERAMIC SOCIETY,37(4),1253-1259.
MLA Liu, M,et al."Investigation of the damage behavior in CVD SiC irradiated with 70 keV He ions by NEXAFS, Raman and TEM".JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 37.4(2017):1253-1259.
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