One-dimensional stitching interferometry assisted by a triple-beam interferometer
Xue, JP; Huang, L; Gao, B; Kaznatcheev, K; Idir, M
2017
发表期刊OPTICS EXPRESS
ISSN1094-4087
卷号25期号:8页码:9393-9405
文章类型期刊论文
摘要In this work, we proposed for stitching interferometry to use a triple-beam interferometer to measure both the distance and the tilt for all sub-apertures before the stitching process. The relative piston between two neighboring sub-apertures is then calculated by using the data in the overlapping area. Comparisons are made between our method, and the classical least-squares principle stitching method. Our method can improve the accuracy and repeatability of the classical stitching method when a large number of sub-aperture topographies are taken into account. Our simulations and experiments on flat and spherical mirrors indicate that our proposed method can decrease the influence of the interferometer error from the stitched result. The comparison of stitching system with Fizeau interferometry data is about 2 nm root mean squares and the repeatability is within +/- 2.5 nm peak to valley. (C) 2017 Optical Society of America
DOI10.1364/OE.25.009393
收录类别SCI
语种英语
WOS记录号WOS:000400665200107
引用统计
文献类型期刊论文
条目标识符http://ir.sinap.ac.cn/handle/331007/27399
专题中科院上海应用物理研究所2011-2018年
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Xue, JP,Huang, L,Gao, B,et al. One-dimensional stitching interferometry assisted by a triple-beam interferometer[J]. OPTICS EXPRESS,2017,25(8):9393-9405.
APA Xue, JP,Huang, L,Gao, B,Kaznatcheev, K,&Idir, M.(2017).One-dimensional stitching interferometry assisted by a triple-beam interferometer.OPTICS EXPRESS,25(8),9393-9405.
MLA Xue, JP,et al."One-dimensional stitching interferometry assisted by a triple-beam interferometer".OPTICS EXPRESS 25.8(2017):9393-9405.
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