中国科学院上海应用物理研究所机构知识库
Advanced  
CAS OpenIR  > 中科院上海应用物理研究所2011-2017年  > 期刊论文
题名:
One-dimensional stitching interferometry assisted by a triple-beam interferometer
作者: Xue, JP; Huang, L; Gao, B; Kaznatcheev, K; Idir, M
刊名: OPTICS EXPRESS
出版日期: 2017
卷号: 25, 期号:8, 页码:9393-9405
DOI: 10.1364/OE.25.009393
文章类型: 期刊论文
英文摘要: In this work, we proposed for stitching interferometry to use a triple-beam interferometer to measure both the distance and the tilt for all sub-apertures before the stitching process. The relative piston between two neighboring sub-apertures is then calculated by using the data in the overlapping area. Comparisons are made between our method, and the classical least-squares principle stitching method. Our method can improve the accuracy and repeatability of the classical stitching method when a large number of sub-aperture topographies are taken into account. Our simulations and experiments on flat and spherical mirrors indicate that our proposed method can decrease the influence of the interferometer error from the stitched result. The comparison of stitching system with Fizeau interferometry data is about 2 nm root mean squares and the repeatability is within +/- 2.5 nm peak to valley. (C) 2017 Optical Society of America
收录类别: SCI
语种: 英语
WOS记录号: WOS:000400665200107
ISSN号: 1094-4087
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.sinap.ac.cn/handle/331007/27399
Appears in Collections:中科院上海应用物理研究所2011-2017年_期刊论文

Files in This Item: Download All
File Name/ File Size Content Type Version Access License
One-dimensional stitching interferometry assisted by a triple-beam interferometer.pdf(5694KB)期刊论文作者接受稿开放获取View Download

Recommended Citation:
Xue, JP,Huang, L,Gao, B,et al. One-dimensional stitching interferometry assisted by a triple-beam interferometer[J]. OPTICS EXPRESS,2017-01-01,25(8):9393-9405.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Xue, JP]'s Articles
[Huang, L]'s Articles
[Gao, B]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Xue, JP]‘s Articles
[Huang, L]‘s Articles
[Gao, B]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: One-dimensional stitching interferometry assisted by a triple-beam interferometer.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Powered by CSpace