One-dimensional stitching interferometry assisted by a triple-beam interferometer

doi:10.1364/OE.25.009393

CAS OpenIR > 中科院上海应用物理研究所2011-2018年

	One-dimensional stitching interferometry assisted by a triple-beam interferometer
	Xue, JP; Huang, L; Gao, B; Kaznatcheev, K; Idir, M
	2017
发表期刊	OPTICS EXPRESS
ISSN	1094-4087
卷号	25 期号:8 页码:9393-9405
文章类型	期刊论文
摘要	In this work, we proposed for stitching interferometry to use a triple-beam interferometer to measure both the distance and the tilt for all sub-apertures before the stitching process. The relative piston between two neighboring sub-apertures is then calculated by using the data in the overlapping area. Comparisons are made between our method, and the classical least-squares principle stitching method. Our method can improve the accuracy and repeatability of the classical stitching method when a large number of sub-aperture topographies are taken into account. Our simulations and experiments on flat and spherical mirrors indicate that our proposed method can decrease the influence of the interferometer error from the stitched result. The comparison of stitching system with Fizeau interferometry data is about 2 nm root mean squares and the repeatability is within +/- 2.5 nm peak to valley. (C) 2017 Optical Society of America
DOI	10.1364/OE.25.009393
收录类别	SCI
语种	英语
WOS记录号	WOS:000400665200107
引用统计	被引频次：8[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.sinap.ac.cn/handle/331007/27399
专题	中科院上海应用物理研究所2011-2018年
推荐引用方式 GB/T 7714	Xue, JP,Huang, L,Gao, B,et al. One-dimensional stitching interferometry assisted by a triple-beam interferometer[J]. OPTICS EXPRESS,2017,25(8):9393-9405.
APA	Xue, JP,Huang, L,Gao, B,Kaznatcheev, K,&Idir, M.(2017).One-dimensional stitching interferometry assisted by a triple-beam interferometer.OPTICS EXPRESS,25(8),9393-9405.
MLA	Xue, JP,et al."One-dimensional stitching interferometry assisted by a triple-beam interferometer".OPTICS EXPRESS 25.8(2017):9393-9405.

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