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| One-dimensional stitching interferometry assisted by a triple-beam interferometer | |
| Xue, JP; Huang, L; Gao, B; Kaznatcheev, K; Idir, M | |
| 2017 | |
| Source Publication | OPTICS EXPRESS
 |
| ISSN | 1094-4087 |
| Volume | 25Issue:8Pages:9393-9405 |
| Subtype | 期刊论文 |
| Abstract | In this work, we proposed for stitching interferometry to use a triple-beam interferometer to measure both the distance and the tilt for all sub-apertures before the stitching process. The relative piston between two neighboring sub-apertures is then calculated by using the data in the overlapping area. Comparisons are made between our method, and the classical least-squares principle stitching method. Our method can improve the accuracy and repeatability of the classical stitching method when a large number of sub-aperture topographies are taken into account. Our simulations and experiments on flat and spherical mirrors indicate that our proposed method can decrease the influence of the interferometer error from the stitched result. The comparison of stitching system with Fizeau interferometry data is about 2 nm root mean squares and the repeatability is within +/- 2.5 nm peak to valley. (C) 2017 Optical Society of America |
| DOI | 10.1364/OE.25.009393 |
| Indexed By | SCI |
| Language | 英语 |
| WOS ID | WOS:000400665200107 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.sinap.ac.cn/handle/331007/27399 |
| Collection | 中科院上海应用物理研究所2011-2020年 |
| Recommended Citation GB/T 7714 | Xue, JP,Huang, L,Gao, B,et al. One-dimensional stitching interferometry assisted by a triple-beam interferometer[J]. OPTICS EXPRESS,2017,25(8):9393-9405. |
| APA | Xue, JP,Huang, L,Gao, B,Kaznatcheev, K,&Idir, M.(2017).One-dimensional stitching interferometry assisted by a triple-beam interferometer.OPTICS EXPRESS,25(8),9393-9405. |
| MLA | Xue, JP,et al."One-dimensional stitching interferometry assisted by a triple-beam interferometer".OPTICS EXPRESS 25.8(2017):9393-9405. |
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| File Name/Size | DocType | Version | Access | License | ||
| One-dimensional stit（5694KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Download | |
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