CAS OpenIR  > 中科院上海应用物理研究所2011-2019年
One-dimensional stitching interferometry assisted by a triple-beam interferometer
Xue, JP; Huang, L; Gao, B; Kaznatcheev, K; Idir, M
2017
Source PublicationOPTICS EXPRESS
ISSN1094-4087
Volume25Issue:8Pages:9393-9405
Subtype期刊论文
AbstractIn this work, we proposed for stitching interferometry to use a triple-beam interferometer to measure both the distance and the tilt for all sub-apertures before the stitching process. The relative piston between two neighboring sub-apertures is then calculated by using the data in the overlapping area. Comparisons are made between our method, and the classical least-squares principle stitching method. Our method can improve the accuracy and repeatability of the classical stitching method when a large number of sub-aperture topographies are taken into account. Our simulations and experiments on flat and spherical mirrors indicate that our proposed method can decrease the influence of the interferometer error from the stitched result. The comparison of stitching system with Fizeau interferometry data is about 2 nm root mean squares and the repeatability is within +/- 2.5 nm peak to valley. (C) 2017 Optical Society of America
DOI10.1364/OE.25.009393
Indexed BySCI
Language英语
WOS IDWOS:000400665200107
Citation statistics
Cited Times:10[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/27399
Collection中科院上海应用物理研究所2011-2019年
Recommended Citation
GB/T 7714
Xue, JP,Huang, L,Gao, B,et al. One-dimensional stitching interferometry assisted by a triple-beam interferometer[J]. OPTICS EXPRESS,2017,25(8):9393-9405.
APA Xue, JP,Huang, L,Gao, B,Kaznatcheev, K,&Idir, M.(2017).One-dimensional stitching interferometry assisted by a triple-beam interferometer.OPTICS EXPRESS,25(8),9393-9405.
MLA Xue, JP,et al."One-dimensional stitching interferometry assisted by a triple-beam interferometer".OPTICS EXPRESS 25.8(2017):9393-9405.
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