Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography
Xue, CF; Zhao, J; Wu, YQ; Yu, HN; Yang, SM; Wang, LS; Zhao, WC; Wu, Q; Zhu, ZC; Liu, B; Zhang, X; Zhou, WC; Tai, RZ
2017
发表期刊APPLIED SURFACE SCIENCE
ISSN0169-4332
卷号425期号:-页码:553-557
文章类型期刊论文
摘要Periodic nanostructures have attracted considerable interest and been applied in many fields. However, nanostructures of sufficiently large areas and depths are necessary for the development of practical devices. In this study, large-area high-aspect-ratio periodic nanostructures were fabricated by using a hybrid technology based on X-ray interference lithography, and then the patterns were transferred onto various substrates successfully. The final periodic nanostructures on the substrate attained measurements up to square centimetres with depths greater than 200 nm. (C) 2017 Elsevier B.V. All rights reserved.
关键词Extreme-ultraviolet Nanoparticles Resolution Arrays Light
DOI10.1016/j.apsusc.2017.07.010
关键词[WOS]EXTREME-ULTRAVIOLET ; NANOPARTICLES ; RESOLUTION ; ARRAYS ; LIGHT
收录类别SCI
语种英语
WOS记录号WOS:000410609400068
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.sinap.ac.cn/handle/331007/28654
专题中科院上海应用物理研究所2011-2018年
推荐引用方式
GB/T 7714
Xue, CF,Zhao, J,Wu, YQ,et al. Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography[J]. APPLIED SURFACE SCIENCE,2017,425(-):553-557.
APA Xue, CF.,Zhao, J.,Wu, YQ.,Yu, HN.,Yang, SM.,...&Tai, RZ.(2017).Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography.APPLIED SURFACE SCIENCE,425(-),553-557.
MLA Xue, CF,et al."Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography".APPLIED SURFACE SCIENCE 425.-(2017):553-557.
条目包含的文件 下载所有文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
Fabrication of large(1187KB)期刊论文作者接受稿开放获取CC BY-NC-SA浏览 下载
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Xue, CF]的文章
[Zhao, J]的文章
[Wu, YQ]的文章
百度学术
百度学术中相似的文章
[Xue, CF]的文章
[Zhao, J]的文章
[Wu, YQ]的文章
必应学术
必应学术中相似的文章
[Xue, CF]的文章
[Zhao, J]的文章
[Wu, YQ]的文章
相关权益政策
暂无数据
收藏/分享
文件名: Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。