CAS OpenIR  > 中科院上海应用物理研究所2011-2018年
Normal tracing deflectometry using a secondary light source
Peng, CQ; He, YM; Wang, J
2017
Source PublicationJOURNAL OF SYNCHROTRON RADIATION
ISSN1600-5775
Volume24Issue:-Pages:765-774
Subtype期刊论文
AbstractScanning deflectometric profilers based on an f-theta system are typical optical tools used to measure mirror profiles at many synchrotron facilities. Unlike these profilers, which are based on a pencil beam, here a secondary light source and a pinhole are used to construct a system that automatically selects a beam that will always pass through the pinhole and propagate along the normal direction of the measured area on the surface under test. By measuring the angle variation of the selected beam, slope variations of the surface under test can be measured. Systematic errors introduced by manufacturing defects or aberrations of an optical element, which greatly degrade the performance of traditional profilers, could be minimized by using the developed method. Simulation values of the proposed method and a conventional method are compared.
KeywordSurface Profiler Accuracy Mirrors
DOI10.1107/S1600577517007135
WOS KeywordSURFACE PROFILER ; ACCURACY ; MIRRORS
Indexed BySCI
Language英语
WOS IDWOS:000404629100006
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/28748
Collection中科院上海应用物理研究所2011-2018年
Recommended Citation
GB/T 7714
Peng, CQ,He, YM,Wang, J. Normal tracing deflectometry using a secondary light source[J]. JOURNAL OF SYNCHROTRON RADIATION,2017,24(-):765-774.
APA Peng, CQ,He, YM,&Wang, J.(2017).Normal tracing deflectometry using a secondary light source.JOURNAL OF SYNCHROTRON RADIATION,24(-),765-774.
MLA Peng, CQ,et al."Normal tracing deflectometry using a secondary light source".JOURNAL OF SYNCHROTRON RADIATION 24.-(2017):765-774.
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