Normal tracing deflectometry using a secondary light source
Peng, CQ; He, YM; Wang, J
2017
发表期刊JOURNAL OF SYNCHROTRON RADIATION
ISSN1600-5775
卷号24期号:-页码:765-774
文章类型期刊论文
摘要Scanning deflectometric profilers based on an f-theta system are typical optical tools used to measure mirror profiles at many synchrotron facilities. Unlike these profilers, which are based on a pencil beam, here a secondary light source and a pinhole are used to construct a system that automatically selects a beam that will always pass through the pinhole and propagate along the normal direction of the measured area on the surface under test. By measuring the angle variation of the selected beam, slope variations of the surface under test can be measured. Systematic errors introduced by manufacturing defects or aberrations of an optical element, which greatly degrade the performance of traditional profilers, could be minimized by using the developed method. Simulation values of the proposed method and a conventional method are compared.
关键词Surface Profiler Accuracy Mirrors
DOI10.1107/S1600577517007135
关键词[WOS]SURFACE PROFILER ; ACCURACY ; MIRRORS
收录类别SCI
语种英语
WOS记录号WOS:000404629100006
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.sinap.ac.cn/handle/331007/28748
专题中科院上海应用物理研究所2011-2018年
推荐引用方式
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Peng, CQ,He, YM,Wang, J. Normal tracing deflectometry using a secondary light source[J]. JOURNAL OF SYNCHROTRON RADIATION,2017,24(-):765-774.
APA Peng, CQ,He, YM,&Wang, J.(2017).Normal tracing deflectometry using a secondary light source.JOURNAL OF SYNCHROTRON RADIATION,24(-),765-774.
MLA Peng, CQ,et al."Normal tracing deflectometry using a secondary light source".JOURNAL OF SYNCHROTRON RADIATION 24.-(2017):765-774.
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