CAS OpenIR  > 中科院上海应用物理研究所2011-2019年
Multi-slice ptychography with large numerical aperture multilayer Laue lenses
Ozturk, H; Yan, HF; He, Y; Ge, MY; Dong, ZH; Lin, MF; Nazaretski, E; Robinson, IK; Chu, YS; Huang, XJ
2018
Source PublicationOPTICA
ISSN2334-2536
Volume5Issue:5Pages:601-607
Subtype期刊论文
AbstractThe highly convergent x-ray beam focused by multilayer Laue lenses with large numerical apertures is used as a threedimensional (3D) probe to image layered structures with an axial separation larger than the depth of focus. Instead of collecting weakly scattered high-spatial-frequency signals, the depth-resolving power is provided purely by the intense central cone diverged from the focused beam. Using the multi-slice ptychography method combined with the on-the-fly scan scheme, two layers of nanoparticles separated by 10 mu m are successfully reconstructed with 8.1 nm lateral resolution and with a dwell time as low as 0.05 s per scan point. This approach obtains high-resolution images with extended depth of field, which paves the way for multi-slice ptychography as a high throughput technique for high-resolution 3D imaging of thick samples. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
KeywordRay-diffraction Microscopy X-ray Integrated-circuits Scan Ptychography Resolution Nm Scattering Focus Field
DOI10.1364/OPTICA.5.000601
Indexed BySCI
Language英语
WOS IDWOS:000432560400014
Citation statistics
Cited Times:11[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/29078
Collection中科院上海应用物理研究所2011-2019年
Affiliation1.Ozturk, H
2.Yan, HF
3.He, Y
4.Ge, MY
5.Dong, ZH
6.Lin, MF
7.Nazaretski, E
8.Robinson, IK
9.Chu, YS
10.Huang, XJ
Recommended Citation
GB/T 7714
Ozturk, H,Yan, HF,He, Y,et al. Multi-slice ptychography with large numerical aperture multilayer Laue lenses[J]. OPTICA,2018,5(5):601-607.
APA Ozturk, H.,Yan, HF.,He, Y.,Ge, MY.,Dong, ZH.,...&Huang, XJ.(2018).Multi-slice ptychography with large numerical aperture multilayer Laue lenses.OPTICA,5(5),601-607.
MLA Ozturk, H,et al."Multi-slice ptychography with large numerical aperture multilayer Laue lenses".OPTICA 5.5(2018):601-607.
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