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Multi-slice ptychography with large numerical aperture multilayer Laue lenses | |
Ozturk, H; Yan, HF; He, Y; Ge, MY; Dong, ZH; Lin, MF; Nazaretski, E; Robinson, IK; Chu, YS; Huang, XJ | |
2018 | |
Source Publication | OPTICA
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ISSN | 2334-2536 |
Volume | 5Issue:5Pages:601-607 |
Subtype | 期刊论文 |
Abstract | The highly convergent x-ray beam focused by multilayer Laue lenses with large numerical apertures is used as a threedimensional (3D) probe to image layered structures with an axial separation larger than the depth of focus. Instead of collecting weakly scattered high-spatial-frequency signals, the depth-resolving power is provided purely by the intense central cone diverged from the focused beam. Using the multi-slice ptychography method combined with the on-the-fly scan scheme, two layers of nanoparticles separated by 10 mu m are successfully reconstructed with 8.1 nm lateral resolution and with a dwell time as low as 0.05 s per scan point. This approach obtains high-resolution images with extended depth of field, which paves the way for multi-slice ptychography as a high throughput technique for high-resolution 3D imaging of thick samples. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement |
Keyword | Ray-diffraction Microscopy X-ray Integrated-circuits Scan Ptychography Resolution Nm Scattering Focus Field |
DOI | 10.1364/OPTICA.5.000601 |
Indexed By | SCI |
Language | 英语 |
WOS ID | WOS:000432560400014 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.sinap.ac.cn/handle/331007/29078 |
Collection | 中科院上海应用物理研究所2011-2019年 |
Affiliation | 1.Ozturk, H 2.Yan, HF 3.He, Y 4.Ge, MY 5.Dong, ZH 6.Lin, MF 7.Nazaretski, E 8.Robinson, IK 9.Chu, YS 10.Huang, XJ |
Recommended Citation GB/T 7714 | Ozturk, H,Yan, HF,He, Y,et al. Multi-slice ptychography with large numerical aperture multilayer Laue lenses[J]. OPTICA,2018,5(5):601-607. |
APA | Ozturk, H.,Yan, HF.,He, Y.,Ge, MY.,Dong, ZH.,...&Huang, XJ.(2018).Multi-slice ptychography with large numerical aperture multilayer Laue lenses.OPTICA,5(5),601-607. |
MLA | Ozturk, H,et al."Multi-slice ptychography with large numerical aperture multilayer Laue lenses".OPTICA 5.5(2018):601-607. |
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Multi-slice ptychogr(1287KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Download |
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