Multi-slice ptychography with large numerical aperture multilayer Laue lenses

doi:10.1364/OPTICA.5.000601

CAS OpenIR > 中科院上海应用物理研究所2011-2018年

	Multi-slice ptychography with large numerical aperture multilayer Laue lenses
	Ozturk, H ; Yan, HF ; He, Y ; Ge, MY ; Dong, ZH ; Lin, MF ; Nazaretski, E ; Robinson, IK ; Chu, YS ; Huang, XJ
	2018
Source Publication	OPTICA
ISSN	2334-2536
Volume	5 Issue:5 Pages:601-607
Subtype	期刊论文
Abstract	The highly convergent x-ray beam focused by multilayer Laue lenses with large numerical apertures is used as a threedimensional (3D) probe to image layered structures with an axial separation larger than the depth of focus. Instead of collecting weakly scattered high-spatial-frequency signals, the depth-resolving power is provided purely by the intense central cone diverged from the focused beam. Using the multi-slice ptychography method combined with the on-the-fly scan scheme, two layers of nanoparticles separated by 10 mu m are successfully reconstructed with 8.1 nm lateral resolution and with a dwell time as low as 0.05 s per scan point. This approach obtains high-resolution images with extended depth of field, which paves the way for multi-slice ptychography as a high throughput technique for high-resolution 3D imaging of thick samples. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Keyword	Ray-diffraction Microscopy X-ray Integrated-circuits Scan Ptychography Resolution Nm Scattering Focus Field
DOI	10.1364/OPTICA.5.000601
Indexed By	SCI
Language	英语
WOS ID	WOS:000432560400014
Citation statistics	Cited Times:9[WOS] [WOS Record] [Related Records in WOS]
Document Type	期刊论文
Identifier	http://ir.sinap.ac.cn/handle/331007/29078
Collection	中科院上海应用物理研究所2011-2018年
Affiliation	1.Ozturk, H 2.Yan, HF 3.He, Y 4.Ge, MY 5.Dong, ZH 6.Lin, MF 7.Nazaretski, E 8.Robinson, IK 9.Chu, YS 10.Huang, XJ
Recommended Citation GB/T 7714	Ozturk, H,Yan, HF,He, Y,et al. Multi-slice ptychography with large numerical aperture multilayer Laue lenses[J]. OPTICA,2018,5(5):601-607.
APA	Ozturk, H.,Yan, HF.,He, Y.,Ge, MY.,Dong, ZH.,...&Huang, XJ.(2018).Multi-slice ptychography with large numerical aperture multilayer Laue lenses.OPTICA,5(5),601-607.
MLA	Ozturk, H,et al."Multi-slice ptychography with large numerical aperture multilayer Laue lenses".OPTICA 5.5(2018):601-607.

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