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One-dimensional angular-measurement-based stitching interferometry
Huang, L; Xue, JP; Ga, B; Idir, M
Source PublicationOPTICS EXPRESS
AbstractIn this work, we present. one-dimensional stitching interferometry based on the angular measurement for high-precision mirror metrology. The tilt error introduced by the stage motion during the stitching process is measured by an extra angular measurement device. The local profile measured by the interferometer in a single field of view is corrected using the measured angle before the piston adjustment in the stitching process. Comparing to the classical software stitching technique, the angle measuring stitching technique is more reliable and accurate in profiling mirror surface at the nanometer level. Experimental results demonstrate the feasibility of the proposed stitching technique. Based on our measurements, the typical repeatability within 200 mm scanning range is 0.5 nm RMS or less. (C) 2018 Optical Society of America
KeywordRay Reflective Optics
Indexed BySCI
WOS IDWOS:000430337700044
Citation statistics
Document Type期刊论文
Affiliation1.Huang, L
2.Xue, JP
3.Ga, B
4.Idir, M
Recommended Citation
GB/T 7714
Huang, L,Xue, JP,Ga, B,et al. One-dimensional angular-measurement-based stitching interferometry[J]. OPTICS EXPRESS,2018,26(8):9882-9892.
APA Huang, L,Xue, JP,Ga, B,&Idir, M.(2018).One-dimensional angular-measurement-based stitching interferometry.OPTICS EXPRESS,26(8),9882-9892.
MLA Huang, L,et al."One-dimensional angular-measurement-based stitching interferometry".OPTICS EXPRESS 26.8(2018):9882-9892.
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