One-dimensional angular-measurement-based stitching interferometry
Huang, L; Xue, JP; Ga, B; Idir, M
2018
发表期刊OPTICS EXPRESS
ISSN1094-4087
卷号26期号:8页码:9882-9892
文章类型期刊论文
摘要In this work, we present. one-dimensional stitching interferometry based on the angular measurement for high-precision mirror metrology. The tilt error introduced by the stage motion during the stitching process is measured by an extra angular measurement device. The local profile measured by the interferometer in a single field of view is corrected using the measured angle before the piston adjustment in the stitching process. Comparing to the classical software stitching technique, the angle measuring stitching technique is more reliable and accurate in profiling mirror surface at the nanometer level. Experimental results demonstrate the feasibility of the proposed stitching technique. Based on our measurements, the typical repeatability within 200 mm scanning range is 0.5 nm RMS or less. (C) 2018 Optical Society of America
关键词Ray Reflective Optics
DOI10.1364/OE.26.009882
收录类别SCI
语种英语
WOS记录号WOS:000430337700044
引用统计
文献类型期刊论文
条目标识符http://ir.sinap.ac.cn/handle/331007/29093
专题中科院上海应用物理研究所2011-2018年
作者单位1.Huang, L
2.Xue, JP
3.Ga, B
4.Idir, M
推荐引用方式
GB/T 7714
Huang, L,Xue, JP,Ga, B,et al. One-dimensional angular-measurement-based stitching interferometry[J]. OPTICS EXPRESS,2018,26(8):9882-9892.
APA Huang, L,Xue, JP,Ga, B,&Idir, M.(2018).One-dimensional angular-measurement-based stitching interferometry.OPTICS EXPRESS,26(8),9882-9892.
MLA Huang, L,et al."One-dimensional angular-measurement-based stitching interferometry".OPTICS EXPRESS 26.8(2018):9882-9892.
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