CAS OpenIR  > 中科院上海应用物理研究所2011-2018年
Optimization of pencil beam f-theta lens for high-accuracy metrology
Peng, CQ; He, YM; Wang, J
2018
Source PublicationOPTICAL ENGINEERING
ISSN0091-3286
Volume57Issue:1Pages:-
Subtype期刊论文
AbstractPencil beam deflectometric profilers are common instruments for high-accuracy surface slope metrology of x-ray mirrors in synchrotron facilities. An f-theta optical system is a key optical component of the deflectometric profilers and is used to perform the linear angle-to-position conversion. Traditional optimization procedures of the f-theta systems are not directly related to the angle-to-position conversion relation and are performed with stops of large size and a fixed working distance, which means they may not be suitable for the design of f-theta systems working with a small-sized pencil beam within a working distance range for ultra-high-accuracy metrology. If an f-theta system is not well-designed, aberrations of the f-theta system will introduce many systematic errors into the measurement. A least-squares' fitting procedure was used to optimize the configuration parameters of an f-theta system. Simulations using ZEMAX software showed that the optimized f-theta system significantly suppressed the angle-to-position conversion errors caused by aberrations. Any pencil-beam f-theta optical system can be optimized with the help of this optimization method. (c) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
KeywordLong Trace Profiler Surface Profiler Deflectometry Ellipse Mirrors Circle Range
DOI10.1117/1.OE.57.1.015101
Indexed BySCI
Language英语
WOS IDWOS:000424272600044
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/29096
Collection中科院上海应用物理研究所2011-2018年
Affiliation1.Peng, CQ
2.He, YM
3.Wang, J
Recommended Citation
GB/T 7714
Peng, CQ,He, YM,Wang, J. Optimization of pencil beam f-theta lens for high-accuracy metrology[J]. OPTICAL ENGINEERING,2018,57(1):-.
APA Peng, CQ,He, YM,&Wang, J.(2018).Optimization of pencil beam f-theta lens for high-accuracy metrology.OPTICAL ENGINEERING,57(1),-.
MLA Peng, CQ,et al."Optimization of pencil beam f-theta lens for high-accuracy metrology".OPTICAL ENGINEERING 57.1(2018):-.
Files in This Item: Download All
File Name/Size DocType Version Access License
Optimization of penc(1178KB)期刊论文作者接受稿开放获取CC BY-NC-SAView Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Peng, CQ]'s Articles
[He, YM]'s Articles
[Wang, J]'s Articles
Baidu academic
Similar articles in Baidu academic
[Peng, CQ]'s Articles
[He, YM]'s Articles
[Wang, J]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Peng, CQ]'s Articles
[He, YM]'s Articles
[Wang, J]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: Optimization of pencil beam f-theta lens for high-accuracy metrology.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.