CAS OpenIR  > 中科院上海应用物理研究所2011-2020年
Optimization of pencil beam f-theta lens for high-accuracy metrology
Peng, CQ; He, YM; Wang, J
AbstractPencil beam deflectometric profilers are common instruments for high-accuracy surface slope metrology of x-ray mirrors in synchrotron facilities. An f-theta optical system is a key optical component of the deflectometric profilers and is used to perform the linear angle-to-position conversion. Traditional optimization procedures of the f-theta systems are not directly related to the angle-to-position conversion relation and are performed with stops of large size and a fixed working distance, which means they may not be suitable for the design of f-theta systems working with a small-sized pencil beam within a working distance range for ultra-high-accuracy metrology. If an f-theta system is not well-designed, aberrations of the f-theta system will introduce many systematic errors into the measurement. A least-squares' fitting procedure was used to optimize the configuration parameters of an f-theta system. Simulations using ZEMAX software showed that the optimized f-theta system significantly suppressed the angle-to-position conversion errors caused by aberrations. Any pencil-beam f-theta optical system can be optimized with the help of this optimization method. (c) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
KeywordLong Trace Profiler Surface Profiler Deflectometry Ellipse Mirrors Circle Range
Indexed BySCI
WOS IDWOS:000424272600044
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Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Affiliation1.Peng, CQ
2.He, YM
3.Wang, J
Recommended Citation
GB/T 7714
Peng, CQ,He, YM,Wang, J. Optimization of pencil beam f-theta lens for high-accuracy metrology[J]. OPTICAL ENGINEERING,2018,57(1):-.
APA Peng, CQ,He, YM,&Wang, J.(2018).Optimization of pencil beam f-theta lens for high-accuracy metrology.OPTICAL ENGINEERING,57(1),-.
MLA Peng, CQ,et al."Optimization of pencil beam f-theta lens for high-accuracy metrology".OPTICAL ENGINEERING 57.1(2018):-.
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