Optimization of pencil beam f-theta lens for high-accuracy metrology
Peng, CQ; He, YM; Wang, J
2018
发表期刊OPTICAL ENGINEERING
ISSN0091-3286
卷号57期号:1页码:-
文章类型期刊论文
摘要Pencil beam deflectometric profilers are common instruments for high-accuracy surface slope metrology of x-ray mirrors in synchrotron facilities. An f-theta optical system is a key optical component of the deflectometric profilers and is used to perform the linear angle-to-position conversion. Traditional optimization procedures of the f-theta systems are not directly related to the angle-to-position conversion relation and are performed with stops of large size and a fixed working distance, which means they may not be suitable for the design of f-theta systems working with a small-sized pencil beam within a working distance range for ultra-high-accuracy metrology. If an f-theta system is not well-designed, aberrations of the f-theta system will introduce many systematic errors into the measurement. A least-squares' fitting procedure was used to optimize the configuration parameters of an f-theta system. Simulations using ZEMAX software showed that the optimized f-theta system significantly suppressed the angle-to-position conversion errors caused by aberrations. Any pencil-beam f-theta optical system can be optimized with the help of this optimization method. (c) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
关键词Long Trace Profiler Surface Profiler Deflectometry Ellipse Mirrors Circle Range
DOI10.1117/1.OE.57.1.015101
收录类别SCI
语种英语
WOS记录号WOS:000424272600044
引用统计
文献类型期刊论文
条目标识符http://ir.sinap.ac.cn/handle/331007/29096
专题中科院上海应用物理研究所2011-2018年
作者单位1.Peng, CQ
2.He, YM
3.Wang, J
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Peng, CQ,He, YM,Wang, J. Optimization of pencil beam f-theta lens for high-accuracy metrology[J]. OPTICAL ENGINEERING,2018,57(1):-.
APA Peng, CQ,He, YM,&Wang, J.(2018).Optimization of pencil beam f-theta lens for high-accuracy metrology.OPTICAL ENGINEERING,57(1),-.
MLA Peng, CQ,et al."Optimization of pencil beam f-theta lens for high-accuracy metrology".OPTICAL ENGINEERING 57.1(2018):-.
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