CAS OpenIR  > 中科院上海应用物理研究所2011-2018年
Thickness-dependent structural characteristics for a sputtering-deposited chromium monolayer and Cr/C and Cr/Sc multilayers
Jiang, H; Wang, H; Zhu, JT; Xue, CF; Zhang, JY; Tian, NX; Li, AG
2018
Source PublicationJOURNAL OF SYNCHROTRON RADIATION
ISSN1600-5775
Volume25Pages:785-792
Subtype期刊论文
AbstractThe interior structure, morphology and ligand surrounding of a sputtering-deposited chromium monolayer and Cr/C and Cr/Sc multilayers are determined by various hard X-ray techniques in order to reveal the growth characteristics of Cr-based thin films. A Cr monolayer presents a three-stage growth mode with sudden changes occurring at a layer thickness of similar to 2 nm and beyond 6 nm. Cr-based multilayers are proven to have denser structures due to interfacial diffusion and layer growth mode. Cr/C and Cr/Sc multilayers have different interfacial widths resulting from asymmetry, degree of crystallinity and thermal stability. Cr/Sc multilayers present similar ligand surroundings to Cr foil, whereas Cr/C multilayers are similar to Cr monolayers. The aim of this study is to help understand the structural evolution regulation versus layer thickness and to improve the deposition technology of Cr-based thin films, in particular for obtaining stable Cr-based multilayers with ultra-short periods.
KeywordNitride Thin-films X-ray Mirrors Surface-morphology Optical-surfaces Growth Roughness Layer Microstructure Reflectivity Spectroscopy
DOI10.1107/S1600577518005143
Indexed BySCI
Language英语
WOS IDWOS:000431150000016
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/29188
Collection中科院上海应用物理研究所2011-2018年
Affiliation1.Jiang, H
2.Wang, H
3.Zhu, JT
4.Xue, CF
5.Zhang, JY
6.Tian, NX
7.Li, AG
Recommended Citation
GB/T 7714
Jiang, H,Wang, H,Zhu, JT,et al. Thickness-dependent structural characteristics for a sputtering-deposited chromium monolayer and Cr/C and Cr/Sc multilayers[J]. JOURNAL OF SYNCHROTRON RADIATION,2018,25:785-792.
APA Jiang, H.,Wang, H.,Zhu, JT.,Xue, CF.,Zhang, JY.,...&Li, AG.(2018).Thickness-dependent structural characteristics for a sputtering-deposited chromium monolayer and Cr/C and Cr/Sc multilayers.JOURNAL OF SYNCHROTRON RADIATION,25,785-792.
MLA Jiang, H,et al."Thickness-dependent structural characteristics for a sputtering-deposited chromium monolayer and Cr/C and Cr/Sc multilayers".JOURNAL OF SYNCHROTRON RADIATION 25(2018):785-792.
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