CAS OpenIR  > 中科院上海应用物理研究所2011-2020年
One-step ion beam irradiation manufacture of 3D micro/nanopatterned structures in SiC with tunable work functions
Zhou, YY; Li, SM; Wang, Y; Huang, Q; Zhang, W; Yao, Y; Hao, JM; Sun, Y; Tang, M; Li, B; Zhang, Y; Hu, J; Yan, L
2019
Source PublicationCARBON
ISSN0008-6223
Volume148Issue:-Pages:387—393
Subtype期刊论文
AbstractThe fabrication and design of high-quality three-dimensional (3D) micro/nanostructures are of great importance for the development of new technology. Herein, we report a one-step technique to controllably manufacture 3D micro/nanopatterned structures with tunable work functions in silicon carbide (SiC). The multiscale micro/nanopatterned structures were produced directly by ion beam irradiation-induced swelling with the assistance of masks. The minimum feature size was similar to 52 nm and the swelling height could be controlled flexibly from similar to 1 to similar to 250 nm. The change of work function of the 3D SiC micro/nanostructures could be tuned in the range between 0 and similar to 126.6 meV. Distinct rectifying junction behavior was demonstrated between the irradiated and unirradiated zones. The Young's modulus and hardness values of the irradiated zones stabilized at similar to 298.1 GPa and similar to 24.9 GPa, respectively. (C) 2019 Elsevier Ltd. All rights reserved.
KeywordFIELD-EMISSION LITHOGRAPHY FABRICATION TEMPLATE GRAPHENE DEFECTS TIP
DOI10.1016/j.carbon.2019.04.011
Indexed BySCI
Language英语
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sinap.ac.cn/handle/331007/31741
Collection中科院上海应用物理研究所2011-2020年
Affiliation1.Chinese Acad Sci, Shanghai Inst Appl Phys, Ctr Thorium Molten Salt Reactor Syst, Shanghai 201800, Peoples R China;
2.Chinese Acad Sci, Shanghai Adv Res Inst, Zhangjiang Lab, Shanghai 201210, Peoples R China;
3.Chinese Acad Sci, Shanghai Inst Appl Phys, Key Lab Interfacial Phys & Technol, Shanghai 201800, Peoples R China;
4.Chinese Acad Sci, Shanghai Inst Appl Phys, Phys Biol Lab, Shanghai 201800, Peoples R China;
5.Univ Chinese Acad Sci, Beijing 100049, Peoples R China;
6.Chinese Acad Sci, Shanghai Inst Tech Phys, State Key Lab Infrared Phys, Shanghai 200083, Peoples R China;
7.Los Alamos Natl Lab, Los Alamos, NM 87545 USA
Recommended Citation
GB/T 7714
Zhou, YY,Li, SM,Wang, Y,et al. One-step ion beam irradiation manufacture of 3D micro/nanopatterned structures in SiC with tunable work functions[J]. CARBON,2019,148(-):387—393.
APA Zhou, YY.,Li, SM.,Wang, Y.,Huang, Q.,Zhang, W.,...&Yan, L.(2019).One-step ion beam irradiation manufacture of 3D micro/nanopatterned structures in SiC with tunable work functions.CARBON,148(-),387—393.
MLA Zhou, YY,et al."One-step ion beam irradiation manufacture of 3D micro/nanopatterned structures in SiC with tunable work functions".CARBON 148.-(2019):387—393.
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