CAS OpenIR  > 中科院上海应用物理研究所2011-2019年
Resolving 500 nm axial separation by multi-slice X-ray ptychography
Huang, XJ; Yan, HF; He, Y; Ge, MY; Ozturk, H; Fang, YLL; Ha, S; Lin, MF; Lu, M; Nazaretski, E; Robinson, IK; Chu, YS
AbstractMulti-slice X-ray ptychography offers an approach to achieve images with a nanometre-scale resolution from samples with thicknesses larger than the depth of field of the imaging system by modeling a thick sample as a set of thin slices and accounting for the wavefront propagation effects within the specimen. Here, we present an experimental demonstration that resolves two layers of nanostructures separated by 500 nm along the axial direction, with sub-10 nm and sub-20 nm resolutions on two layers, respectively. Fluorescence maps are simultaneously measured in the multi-modality imaging scheme to assist in decoupling the mixture of low-spatial-frequency features across different slices. The enhanced axial sectioning capability using correlative signals obtained from multi-modality measurements demonstrates the great potential of the multi-slice ptychography method for investigating specimens with extended dimensions in 3D with high resolution.
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Affiliation1.Brookhaven Natl Lab, Natl Synchrotron Light Source 2, Upton, NY 11973 USA;
2.Shanghai Inst Appl Phys, Shanghai Synchrotron Radiat Facil, Shanghai 201204, Peoples R China;
3.Ozyegin Univ, Dept Mech Engn, TR-34794 Istanbul, Turkey;
4.Brookhaven Natl Lab, Computat Sci Initiat, Upton, NY 11973 USA;
5.Brookhaven Natl Lab, Ctr Funct Nanomat, Upton, NY 11973 USA;
6.Brookhaven Natl Lab, Condensed Matter Phys & Mat Dept, Upton, NY 11973 USA;
7.UCL, London Ctr Nanotechnol, London WC1H 0AH, England
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GB/T 7714
Huang, XJ,Yan, HF,He, Y,et al. Resolving 500 nm axial separation by multi-slice X-ray ptychography[J]. ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES,2019,75(-):336—341.
APA Huang, XJ.,Yan, HF.,He, Y.,Ge, MY.,Ozturk, H.,...&Chu, YS.(2019).Resolving 500 nm axial separation by multi-slice X-ray ptychography.ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES,75(-),336—341.
MLA Huang, XJ,et al."Resolving 500 nm axial separation by multi-slice X-ray ptychography".ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES 75.-(2019):336—341.
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